国家/地区 中国（8）
IPC部 C（8）
IPC大类 C23（8）
IPC小类 C23C（8） C01B（3）
IPC C23C016/26（7） C01B032/186（3）
发明人 LIU Z（5） PENG H（5） ZHANG J（3）
CAO F（2） LI G（2） LIU X（2）
WANG K（2） WANG X（2） YANG H（2）
公开年 2021（8）
申请年 2020（4）  2019（2）  2021（2） 
专利权人 UNIV PEKING（8）

Device for preparing graphene by plasma enhanced chemical vapor deposition (PECVD), has first region of deposition furnace that is provided with overlapped portion, and second polar plate that is connected to grounding end of plasma source.

LIU Z, WU Q, CAO F, WANG X, WANG K, YANG H, PENG H

Graphene cold wall growth device, has power supply whose two poles pass through two through holes of reaction chamber, where two poles of power supply are connected with upper electrode plate and lower electrode plate.

CHEN Z, JI N, SHEN C, XU S, ZHANG J

Preparing clean double-layer and few-layer graphene film, comprises placing substrate in atmosphere containing first oxidizing gas, annealing, placing substrate in reaction mixed gas containing reducing gas, a carbon source and a second oxidation gas, and heating to growth temperature.

LI G, ZHANG Y, LIU X, ZHANG M, GAO X, ZHANG J, PENG H, LIU Z

Improving cleanliness of graphene film comprises subjecting graphene film to high-temperature treatment in vacuum environment, and carrying out chemical vapor deposition method.

CHEN H, XUE R, LIU X, ZHANG J, LI G, PENG H, LIU Z

Preparing carbon-based device comprises e.g. transferring multilayer graphene film synthesized by chemical vapor deposition, and placing analytical pure liquid bromine together with transferred multilayer graphene or graphite film.

YU X, TIAN Z, LI M, YU D, REN Z, REN L, FU Y

Detecting grain boundaries of two-dimensional material involves slowly heating two-dimensional material on metal foil in heating device to realize optical visualization of grain boundaries in graphene.

LIU K, XU X, ZOU D, LIU C

Graphene composite metal foil double-side growth device has chemical vapor deposition furnace comprising plasma glow region and heating growth region, and connected with unwinding shaft and winding shaft on both sides.

PENG H, CAO F, YANG H, WANG K, WANG X, LIU Z

Copper foil pre-processing device, has unreeling device for conveying copper foil, winding device for winding and recycling copper foil, and control component for controlling unreeling device, pre-oxidation device and operation parameter of rolling device.

PENG H, LI Q, YANG Q, ZHA B, LIU Z