国家/地区 |
中国(7)![]() |
IPC部 |
C(7)![]() |
IPC大类 |
C23(7)![]() |
IPC小类 |
C23C(7)
C01B(6)
H01L(2)
|
IPC |
C23C014/06(7)![]() |
发明人 | |
公开年 |
2015(7)![]() |
申请年 | 2014(3) 2015(3) |
专利权人 |
CAO Y, HOU X, LI D, ZHAO M, LI X, LIU X
HE L, JIANG M, LI L, XIE X, TANG S, ZHANG D, XIE H, WANG H, CHEN L
FORTE G, FIORENZA P, PEZZULLO G
HUANG C, CHU C, CHIU S, WANG C, WEI C, CHUNG C, WU B, HUANG J, QIU S, WANG J, ZHU J, WEI J, ZHONG C, HUANG C H, CHU C W, CHIU S M, WANG C C, WEI C M, CHUNG C J, WU B H
SCHWAB M G, MUELLEN K, SACHDEV H, ITO Y, SCHWAB M G S, MILLEN K
KALAGA M K, BHATTACHARYYA A, DEVI R M, SCHAEFFER J C, PARAKALA P, PABLA S S, SHEFFIELD J C, PALAKARA P, PABRA S S, CARAGA M K, DEVIE R M