国家/地区 中国（13）
IPC部 C（13） B（3） H（2）
IPC大类 C01（13）
IPC小类 C01B（13）
IPC C23C016/26（13）
发明人 LIU Z（13）
公开年 2019（3） 2021（3） 2013（2）
申请年 2013（3）  2019（3） 
专利权人 UNIV PEKING（6） BEIJING GRAP.（4） CHANGZHOU 2D.（3） CHANGZHOU ER.（3）

Improving quality of metal catalytic thin layer prepared by sputtering comprises cleaning Si/SiO2 substrate, photoetching the pattern, sputtering a layer of metal thin layer with the graphene of catalyzing and growing on the substrate sheet by using the sputtering table, peeling and etching.

ZHAO Y, YU X, LIU Z, NIE X, SONG Z, DENG J, HE X

Device for preparing graphene by plasma enhanced chemical vapor deposition (PECVD), has first region of deposition furnace that is provided with overlapped portion, and second polar plate that is connected to grounding end of plasma source.

LIU Z, WU Q, CAO F, WANG X, WANG K, YANG H, PENG H

Directly growing graphene thin film on surface of non-metallic substrate, involves depositing aluminum oxide film on surface of substrate, evaporating copper film on surface of substrate deposited with aluminum oxide film, annealing and growing graphene by chemical vapor deposition.

LOU G, OUYANG Y, WANG W, LIU Z

Graphene composite metal foil double-side growth device has chemical vapor deposition furnace comprising plasma glow region and heating growth region, and connected with unwinding shaft and winding shaft on both sides.

PENG H, CAO F, YANG H, WANG K, WANG X, LIU Z

Graphene film roll-to-roll production device comprises a vacuum cavity, a vacuum pump assembly and a filling assembly, where the process gas further comprises one monitoring component, and a parameter control assembly.

PENG H, YANG Q, DONG G, ZHA B, LIU Z

Cleaning method of graphene comprises rolling the surface of graphene through curved body provided with adsorbent on curved surface.

LIU Z, PENG H, SUN L, LI Y, LIU X, LIN L, ZHANG J, JIA K

Use of graphene or graphene coating for improving blood compatibility of biological material and/or device.

DUAN X, MENG X, LIU Z, LIU K

Preparation of large size graphene glass involves cleaning large size quartz glass, putting in high temperature tubular furnace, pumping reaction chamber, introducing argon gas and hydrogen gas, and reducing temperature to room temperature.

LIU Z, CHEN X, ZHANG Y

Preparing graphene thin films comprises processing copper foil blank and growing graphene films on copper foil where processing copper foil blank includes e.g. cleaning copper foil blank plasma, decontaminating and treating with oxide layer.

JIN H, LIU Z, QI X, PENG P, YANG H, ZHANG Z, ZHANG W, ZHANG X, DENG K

Graphene growth device comprises graphene deposition system, deposition furnace and trolley.

JIN H, LIU Z, PENG P, ZHOU Z