国家/地区 美国（6）
IPC部 B（6）
IPC大类 B01（6） C01（6） H01（4）
G03（3） G01（2）
IPC小类 B01J（6）
IPC B01J019/08（6）
发明人
公开年 2022（2）
申请年 2022（2） 
专利权人

Performing low-temperature direct growth method of multilayer graphene for manufacturing pellicle for extreme ultraviolet lithography, involves forming etch stopper on substrate, and forming seed layer on etch stopper, where seed layer is selected from boron nitride, or boron carbon nitride.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K

Nanocrystalline graphene used for complementary metal-oxide-semiconductor process, comprises grains in stack of graphene sheets.

KIM S, BYUN K, CHO Y, SHIN K, LEE E, LEE C, SONG H, SHIN H, YOON J, LEE S, LIM H, BYUN K E, CHO Y C, SHIN K W, LEE C S, SONG H J, SHIN H J, SU Y J, LEE S Y, LIM H S, LI Z, YOUN J, SHEN X, LI C, LI Y, ZHAO L, JIN S

Exfoliating graphene flakes from graphite sample by compressing a graphite sample in an electrochemical reactor, and applying a voltage between the graphite sample and an electrode in the electrochemical cell.

ROSCHER S

Formation of patterned magnetic graphene for high density data storage involves transferring or growing graphene film on substrate, functionalizing, hydrogenating to form fully hydrogenated graphene, and manipulating hydrogen content.

LEE W K, WHITENER K E, SHEEHAN P E

Electron microscopy support, useful for receiving biological sample e.g. serum, plasma and saliva, comprises support member, and partially hydrogenated graphene attached to member, where member is attached to support film.

RUSSO C J, PASSMORE L A, RUSSO C, PASSMORE L

Converting a graphene oxide target into graphene, comprises irradiating a graphene oxide target with a light to initiate deoxidation reaction.

GILJE S S, JWILYE E S, GILJE