国家/地区 台湾（5）
IPC部 C（5）
IPC大类 C01（5） H01（5） C23（2）
IPC小类 C01B（5）
IPC C23C016/26（2）
发明人 LIN C（5）
公开年 2022（2）
申请年 2021（2） 
专利权人 TAIWAN SEMIC.（2）

Semiconductor device, comprises substrate and fin structure on substrate, and includes epitaxial region, etch stop layer on epitaxial region, interlayer dielectric layer on etch stop layer, and metal contact through etch stop layer and interlayer dielectric layer.

SHEN T, HUANG J, CHEN S, LIN H, LIN C, WOON W, KHADERBAD M A

Forming graphene on flexible substrate, involves providing polymer substrate including metal structure, carbon source and carrier gas, and subjecting polymer substrate to plasma enhanced chemical vapor deposition process.

TSENG C, LIN C, YEH N, LEU C, LU C

Preparing graphene-containing mixed film, comprises e.g. using strong oxidant to oxidize layered graphite powder to form layered graphene oxide with carbonyl, carboxyl and epoxy groups, and mixing Dimethylformamide and graphene oxide.

LIN C, LIU T, CHUANG Y, WEI H, HSU N

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Battery such as lithium ion battery, useful as energy storage devices in electric car, comprises first electrode comprising particles containing lithium, carbon layer coating surface of particles, and electrochemically exfoliated graphene.

LI L, HU L, LIN C, WU F, LI L J, HU L H, LIN C T, WU F Y