国家/地区 中国（6） 美国（3） 韩国（2） 世界知识产权组织（2）
IPC部 C（10）
IPC大类 H01（10） C01（8） C23（3）
IPC小类 H01J（10）
IPC C01B032/194（4） H01J037/20（4） H01J037/26（4）
H01J037/32（4） C01B032/182（2） C01B032/186（2）
C01B032/198（2）
发明人 GUO C（2） LIU N（2） LU Y（2）
NI X（2） WANG H（2）
公开年 2022（6） 2023（4）
申请年 2022（10）
专利权人 SHUIMU BEIJI.（2） UNIV TSINGHU.（2）

Depositing graphene or graphene oxide onto substrate from gaseous source of carbon precursor involves using plasma-enhanced chemical vapor deposition method, where carbon precursor consists of ethylene and the process is carried out in absence of carrier gas.

JOUIAD M, EL MARSSI M, LEJEUNE M

Chuck assembly used in semiconductor device fabrication system, comprises chuck base includes lower base and upper base that is on lower base, ceramic plate on upper base, and isolator ring enclosing outer sidewall of lower base.

JUNG U, SHIN M, SUNG D, NA D, KIM D, KIM K, JEONG S, JUNG S H, KIMKYUNGSUN, KIM D W, SUNG D Y, SU S M, JUNGUNGYO

Graphene grid used for structural analysis of substance e.g. beta-galactosidase, vacuolar-type adenosine triphosphatase and ferritin, using cryo-electron microscope, has structure in which functional group containing silicon atom and/or phosphorus atom are introduced on graphene surface.

HARUYASU A, MAIKO M, TSUYOSHI I

Preparation method of graphene-based composite material involves using mixed gas of argon gas and hydrogen as carrier gas, and obtaining graphene-based composite material by chemical vapor deposition, where graphene material grows parallel to substrate in composite material.

WEI M, CHEN L, GUO X, ZHAO Y, LI X, ZENG F, TANG S, TANG Z

Upper electrode assembly used in plasma processing apparatus, has heat transfer sheet that is mounted between electrode plate and metal plate and having vertically oriented portion with vertically oriented graphene structures.

TSUJIMOTO H, KOBUNE T, LI L, LEE L, KOBUNEDAKAKI

Composite material used for functionalizing carbon structures within plasma reactor, or liquid collection facility, comprises polymer, and graphene-containing material, where composite material has glass transition temperature that is 10% greater than glass transition temperature of polymer.

KC C B, BALDWIN J, HINES M, VANHEUSDEN K, ROGOJINA E, COOK D, LANNING B, ANZELMO B H, STOWELL M W

Preparing graphene oxide suitable for electron microscope imaging, involves preparing graphene oxide solution, selecting sheet as graphite material, and sieving, centrifuging, acid washing, alkali washing, organic solvent washing.

SUN Q

Preparing graphene electron microscope carrier net comprises spreading hydrocarbon mixture on surface of the graphene film formed on metal substrate, transferring graphene film to electron microscope carrier net, and cleaning hydrocarbon mixture-graphene film-electron microscope carrier net.

NI X, LU Y, LIU N, GUO C, WANG H

Preparing electrically functionalized graphene electron microscope carrier net comprises adopting aromatic diazonium salt with electron-donating group or electron-withdrawing group, laying hydrocarbon mixture on surface of modified graphene film, and transferring to electron microscope carrier grid.

NI X, LIU Y, LU Y, LIU N, RAO Y, GUO C, WANG H

Preparing transmission electron microscope carrier net containing ultra-clean graphene carrier layer useful in situ characterization and tracking of liquid phase reaction comprises e.g. combining transmission electron microscope carrier with graphene film on surface of iron(III) chloride solution.

REN Q, ZHANG Y, ZHAO P