| 国家/地区 |
日本(5)
|
| IPC部 | C(4) H(2) |
| IPC大类 |
C01(4)
H01(2)
H05(2)
|
| IPC小类 |
C01B(4)
H01L(2)
H05B(2)
|
| IPC |
C01B031/02(4)
H01L051/50(2)
H05B033/02(2)
H05B033/28(2) |
| 发明人 |
HASEGAWA M(3)
HASEGAWA MASATAKA(2)
YAMADA T(2)
|
| 公开年 |
2016(5)
|
| 申请年 | 2015(4) |
| 专利权人 |
NAT INST ADVANCED IND SCI TECHNOLOGY(5)
|
UEKUSA K, SHIMADA N, YAZAWA K, YAMADA T, HASEGAWA M, SHIMADA NAYUTA, YAZAWA KENJI, YAMADA TAKATOSHI, HASEGAWA MASATAKA, UEKUSA KAZUTERU
OKIKAWA Y, MIZUTANI W, SUZUKI K, ISHIHARA M, YAMADA T, HASEGAWA M
YUDASAKA M, IIZUMI Y, OKAZAKI T, ZHANG M F
OKIGAWA YUKI, MIZUTANI WATARU, ISHIHARA MASATOU, HASEGAWA MASATAKA
