国家/地区 韩国（7）
IPC部 C（4） G（3） H（2）
IPC大类 C01（3） C23（2） G03（2）
IPC小类 C01B（3） C23C（2） G03F（2）
IPC C01B032/184（2） C01B032/194（2） C23C014/04（2）
G03F001/62（2）
发明人 KWON Y（7） WOOK Y B（7） MOON J（5）
MOON S I（5） KIM K S（4） LEE S M（4）
LEE G H（2）
公开年 2022（4） 2021（2）
申请年 2022（3）  2021（2） 
专利权人 GRAPHENELAB CO LTD（7）

Method for manufacturing pellicle, involves forming upper silicon nitride layer on upper surface of wafer substrate, where pattern is formed on lower silicon n-nitride layer, and metal layer is formed in lower silicon nitride layer.

MOON S I, KWON Y, WOOK Y B, MOON J, KIM K S, LEE S M

Manufacturing method of graphene-coated mold, involves forming mold by forming pattern on laminated dry film photoresist (DFR) or DFR/TRF film through exposure and development.

MOON S I, KWON Y, WOOK Y B

Manufacturing graphene thin film for pellicle material using ozone gas useful in semiconductor devices comprises forming graphene on the upper surface of substrate, exposing graphene layer to ozone, and heat-treating and etching.

LEE G H, KWON Y, WOOK Y B, MOON S I, MOON J, KIM K S, LEE S M

Manufacture of shadow mask, involves forming buffer layer, depositing metal layer, forming amorphous carbon layer and crystalline carbon layer, removing amorphous carbon layer and metal layer, and separating buffer layer and crystalline carbon layer.

MOON S I, KWON Y, WOOK Y B, MOON J, KIM K S, LEE S M

Etchant composition to manufacture graphene with low sheet resistance, comprises sulfuric acid, hydrogen peroxide, purified water, N-heterocyclic aromatic compound e.g. benzotriazole, and aromatic boric acid e.g. phenyl boric acid.

MOON J, KWON Y, WOOK Y B, LEE S M, MOON S I, KIM K S, LEE G H, HYUN D, SIMSUJIN, SHIM S J, HYUN D S, YOO B W, KWON Y D, MOON J T

Heating device used in mat, has electrode connection layers that are stacked in line on both sides in pair, so that graphene layer is connected to electrodes.

DAEKYUKIM, KWON Y, WOOK Y B

Autonomous vehicle radar cover management device, has graphene unit which generates heat by voltage applied while under pulse width modulation (PWM) and having front surface on which radar cover is formed.

WOOK Y B, KWON Y, JANG S, MOON J, WON M