国家/地区 韩国（6） 欧洲专利局（EPO）（2） 美国（2） 世界知识产权组织（2）
IPC部 C（4） G（4） B（3）
H（2）
IPC大类 C01（3） G03（3） B01（2）
IPC小类 C01B（3） G03F（3） B01J（2）
IPC C01B032/184（3） G03F001/62（3） C01B032/182（2）
G03F001/22（2）
发明人 KIMHYUNGKEUN（3） KIM H K（2） KIM H M（2）
KIM H Y（2） KIM S G（2） LEE G H（2）
MI K H（2） YANG W S（2）
公开年 2021（6）
申请年 2020（4）  2019（2） 
专利权人 KOREA ELECTRONICS TECHNOLOGY INST（6）

Preparing pellicle for extreme UV exposure with graphene defect healing layer, involves forming support layer of silicon nitride material on silicon substrate, and forming core layer of graphene material on support layer.

KIMHYUNGKEUN, MI K H, LEE W S, YANG H S, JOJINWOO, KIM B, JEONJUNHYUCK, LEE G H, KIM H Y, JEON J H, KIM S G, CHO J W, KIM H M, KIM H K

Manufacturing graphene-metal composite pellicle containing graphene by forming metal catalyst layer on silicon substrate, forming core layer by growing graphene, forming protective layer, forming heat dissipation layer and forming pellicle frame composed of silicon substrate-metal catalyst layer.

KIM H, LEE G, KIMHYUNGKEUN

Directly growing multilayer graphene used in a pellicle for extreme ultraviolet lithography, involves forming small-layer graphene on SiN substrate, forming metal catalyst layer on small-layer graphene, and forming an amorphous carbon layer.

KIMHYUNGKEUN, MI K H, KIM H Y, LEE G H, SUNG K H, KIM H M, KIM S G, KIM H K

Composition for capacitive hazardous substance sensor electrode, comprises charged and reduced graphene oxide, binder, solvent, and curing agent.

YANG W S, SEONG B M

Surface treatment of through-holes of printed circuit board such as multilayer printed circuit board, involves impregnating board containing through-holes in solution comprising charged and reduced graphene oxide, and cleaning board.

YANG W S

Sand mold used for sand casting method, comprises sand particles; adhesive containing water glass positioned between sand particles to impart adhesive force to maintain sand-shaped shape, and nanostructures dispersed in water glass.

LEE K I, LEE C S, KWONWOO S, KIM S M