| 国家/地区 | 中国(9) 世界知识产权组织(6) 美国(3) |
| IPC部 |
C(6)
B(3)
H(3)
|
| IPC大类 |
C01(5)
C23(5)
B82(3)
H01(3) C30(2) |
| IPC小类 |
C01B(5)
C23C(5)
B82Y(3)
H01L(3) C30B(2) |
| IPC |
C01B031/04(5)
C23C016/26(4)
B82Y040/00(3)
C23C016/02(3) B82Y030/00(2) |
| 发明人 |
DING G(7)
XIE X(7)
JIANG M(5)
TANG S(3) CHEN J(2) DI Z(2) GONG Q(2) SUN L(2) WANG S(2) |
| 公开年 |
2012(9)
|
| 申请年 | 2012(7) 2011(2) |
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(9)
|
DING G, DU F, JIANG M, XIE X
CHAI Z, CHEN J, LUO J, WU Q, YU T
DI Z, DING G, GONG Q, LIU Q, WANG H, WANG S, XIE X
DING G, JIN Q, TANG F, XIE X, ZHANG F, ZHANG H, ZHAO J
DI Z, DING G, GONG Q, JIANG M, SUN L, WANG S, XIE X, ZHU Y
DING G, JIANG M, SHEN H, SUN L, TANG S, WU T, XIE X
CHEN J, DING G, JIANG M, TANG S, WANG C, XIE X
