| 国家/地区 | 韩国(8) 美国(5) 中国(2) 欧洲专利局(EPO)(2) 日本(2) 世界知识产权组织(2) |
| IPC部 | H(6) C(4) |
| IPC大类 |
H01(6)
C01(2)
C23(2)
|
| IPC小类 |
H01L(5)
C01B(2)
C23C(2)
|
| IPC |
H01L021/02(3)
H01L029/16(3)
C01B032/186(2)
C23C016/02(2) C23C016/26(2) C23C016/50(2) H01L021/324(2) H01L051/00(2) |
| 发明人 |
LEE E(8)
|
| 公开年 | 2020(6) |
| 申请年 |
2019(8)
|
| 专利权人 | SAMSUNG ELEC.(4) CENT ADVANCE.(2) POSTECH ACAD.(2) |
YOON H J, KIM S Y, SUNG K W, LEE E J, YOON H, KIM S, SUNG K, LEE E, LI E, CHENG Q, JIN S, YIN X
LEE E, BYUN K, SONG H, SHIN H, KIM C, SHIN K, LEE C, JUNG A, BYUN K E, SONG H J, SHIN H J, SHIN K W, LEE C S, JUNG A R
SHIN H, SHIN K, KIM C, NAM S, BYUN K, SONG H, LEE E, LEE C, JUNG A, CHO Y, SHIN H J, SHIN K W, NAM S G, BYUN K E, SONG H J, LEE C S, JUNG A R, CHO Y C
SHIN K, KIM C, YAMAMOTO K, LEE C, SONG H, LEE E, BYUN K, SHIN H, AN S, SHEN J, JIN C, SHAN B, LI C, SONG X, LI Y, BIAN Q, SHEN X, AN X, SHIN K W, LEE C S, SONG H J, BYUN K E, SHIN H J, AHN S J
NAM S, SHIN H, SHIN K, KIM C, BYUN K, SONG H, LEE E, LEE C, JUNG A, CHO Y, NAM S G, SHIN H J, SHIN K W, BYUN K E, SONG H J, LEE C S, JUNG A R, CHO Y C
HAN T, SUNG T, EOM W, LEE E, HANTAEHEE, SUNG T H, LEE E S
