国家/地区 中国（6）
IPC部 H（6） B（3） C（3）
G（2）
IPC大类 H01（5） C01（3） B81（2）
G01（2） H04（2）
IPC小类 H01L（5） C01B（3） B81B（2）
B81C（2） G01R（2） H04R（2）
IPC H01L029/16（3） B81B003/00（2） B81B007/02（2）
B81C001/00（2） C01B031/04（2） G01R033/07（2）
H01L021/02（2） H01L021/324（2） H01L043/06（2）
H01L043/14（2）
发明人 RUHR G（6）
公开年 2016（3）
申请年 2014（2）  2015（2） 
专利权人 INFINEON TEC.（6） DEHE A（2） RUHL G（2）

Method for forming graphene membrane component for microphone, involves performing energy of adhesion between adhesive layer and graphene membrane which is greater than energy of adhesion between bulk region and graphene membrane.

RUHL G, KOENIG M, RUHR G

Electronic device e.g. passive element, has dielectric structure whose first contact region and second contact region are configured to adjust electrical characteristics of two-dimensional material in contact surfaces of graphene layer.

KOENIG M, RUHL G, RUHR G

Forming graphene structure, comprises forming body with protrusion and forming graphene layer at protrusion outer peripheral surface, or forming cylindrical opening in body and forming graphene layer at inner peripheral surface of opening.

IRSIGLER P, RUHL G, SCHULZE H, SHULZ H, RUHR G, ILSGLLE P

Method for processing substrate used in manufacture of e.g. electronic devices, involves forming graphene layer from specific layer on surface of carrier by temperature treatment.

PRUEGL K, RUHL G, RUHR G, PRUGER K

Hall sensor structure, has carrier layer provided with side part, and seed layer whose part is removed between carrier layer and graphene layer to form graphene structure of graphene layer, where seed layer is formed on side part.

DEHE A, ECKINGER M, KOLB S, RUHL G, DEU A, RUHR G, IKEGINGER M

MEMS acoustic transducer, has dielectric spacer arranged on back plate unit between adjacent conductive perforated back plate portions, and graphene membranes supported by dielectric spacer and extended over perforated back plate portions.

DEHE A, RUHL G, DEU A, RUHR G