| 国家/地区 | 中国(8) |
| IPC部 |
C(4)
H(4)
G(2)
|
| IPC大类 |
H01(4)
C23(3)
C01(2)
G01(2) |
| IPC小类 |
H01L(4)
C23C(3)
C01B(2)
G01D(2) |
| IPC |
C23C016/26(3)
H01L031/028(3)
G01D005/26(2)
H01L031/0216(2) H01L031/09(2) H01L031/18(2) |
| 发明人 |
ZHANG D(8)
|
| 公开年 | 2015(4) 2017(2) 2018(2) |
| 申请年 | 2015(4) 2017(4) |
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(8)
|
LI T, WANG Y, TONG J, ZHANG L, GAO A, ZHANG D, SONG H
LI T, TONG J, WANG Y, ZHANG L, GAO A, ZHANG D, SONG H
LI T, TONG J, WANG Y, ZHANG L, GAO A, ZHANG D, SONG H
LI T, WANG Y, TONG J, ZHANG L, GAO A, ZHANG D, SONG H
CAO D, CHENG X, ZHANG D, WANG Q, WANG Z, ZHENG L, YU Y, CHEN L
CAO D, CHENG X, ZHANG D, WANG Q, WANG Z, ZHENG L, YU Y, CHEN L
DENG L, HE L, JIANG M, LI L, XIE X, ZHANG D, XIE H, WANG H, CHEN L
HE L, JIANG M, LI L, XIE X, TANG S, ZHANG D, XIE H, WANG H, CHEN L
