| 国家/地区 |
美国(14)
|
| IPC部 |
C(14)
|
| IPC大类 |
C23(14)
H01(9)
C01(5)
B82(4) B01(2) |
| IPC小类 |
C23C(14)
C01B(5)
H01L(5)
B82Y(4) B01J(2) H01B(2) H01M(2) |
| IPC |
C23C014/35(14)
|
| 发明人 | |
| 公开年 | 2021(7) 2022(2) |
| 申请年 | 2021(5) 2020(3) 2013(2) 2016(2) |
| 专利权人 |
JUNG J, KIM T, ZHAO P, SHIN M, SHIN H, SEOL M, KIM S, BYUN K, BYUN K E, KIM S W, SHIN H J, SHIN M S, JOVIN, KIM T H, JUNG J H
CHEN X, HOU M, YAN L, XIE B, GUO Y, CHEN Y
NAKAJIMA A, TSUNOYAMA H, UNO M, GUNJI H, ANDO T, TSUKAMOTO K, TONA M, HIRATA N
MA Z, ZHAN X, WANG Z, ZHAO Z, ZHU Y, CHEN J, LIU X, CHEN H
ZHAO Y, WU D, JIANG G, CHENG C, ZHU J, DING Y, JIN Z, WU W
DING J, ZHOU X, LI L, CHENG G, YUAN N, HU X, DONG X
LIU H, DU Y, JIA J, ZHAO J, WEN S, BAI M, XIE F, XIE W, YANG M, WU J, LIU W
LING M, KWON T, KIM J M, YING C C
