国家/地区 |
日本(9)![]() |
IPC部 |
B(9)![]() |
IPC大类 |
C23(9)
B82(8)
C01(7)
B32(5) H01(5) B05(4) B01(2) C03(2) C30(2) |
IPC小类 |
C23C(9)
B82Y(8)
C01B(7)
B32B(5) B05D(4) H01L(4) B01J(2) C30B(2) |
IPC |
C23C016/26(9)![]() |
发明人 |
BAE S K(2)
CHUNG H(2)
CHUNG H J(2)
HEO J(2) HEO J S(2) HUH J(2) HUH J S(2) JUNG H(2) JUNG H J(2) KANG S(2) KANG S R(2) SEO D(2) SEO S(2) SEO S A(2) WOO Y(2) |
公开年 |
2011(9)![]() |
申请年 | 2010(7) |
专利权人 | SAMSUNG ELEC.(2) UNIV SUNGKYU.(2) |
HASEGAWA MASATAKA, ISHIHARA MASATOU, KOGA YOSHINORI, KIM JAEHO, TSUGAWA KAZUO, IIJIMA SUMIO, HASEGAWA M, ISHIHARA M, KOGA Y, KIM J, TSUGAWA K, IIJIMA S, YOSHINORI K, HO K J, KAZUO T, SUMIO I, MASATAKA H, MASATOU I, JAEHO K
BAE S K, CHOI J, HONG B H, KANG J, KIM H K, KIM Y J, YAN J K
BAE S, CHUNG H, HEO J, JUNG M, KANG S, SEO D, SEO S, WOO Y, BAE S K, CHUNG H J, HEO J S, JUNG M H, KANG S R, SEO S A, WOO Y S, JUNG H J, HUH J S, YEO R, HUH J, JUNG H
WOO Y, SEO D, SEO S, CHUNG H, KANG S, HEO J, SEO S A, CHUNG H J, KANG S R, HEO J S, WOO Y S, JUNG H J, HUH J S, YEO R, XU D, HUH J, JUNG H
MCFEELY F R, YURKAS J J, OIDA S, HANNON J B
AGO HIROKI, ITO YOSHITO, TANAKA IZUMI, MIZUNO SEIGI, TSUJI MASAHARU, AGO H, ITO Y, TANAKA I, MIZUNO S, TSUJI M, MIZUNO K
VEERASAMY V S, VEERASAMY V