| 国家/地区 | 中国(12) 韩国(6) 美国(5) |
| IPC部 |
C(16)
|
| IPC大类 |
C23(16)
H01(5)
C01(4)
B82(2) C30(2) G01(2) |
| IPC小类 |
C23C(16)
C01B(4)
H01L(4)
B82Y(2) C30B(2) G01N(2) |
| IPC |
C23C016/50(16)
|
| 发明人 |
LEE C(3)
LEE C S(3)
SHIN H(3)
SHIN H J(3) BYUN K(2) BYUN K E(2) SHIN K(2) SHIN K W(2) ZHANG X(2) ZHOU B(2) |
| 公开年 | 2021(9) 2020(5) 2022(2) |
| 申请年 |
2020(16)
|
| 专利权人 | SAMSUNG ELEC.(3) |
MA X, QIU J, QIAO Y, ZHANG X, LIU X
LEE C, LEE S, SHIN H, BYUN K, SHIN K, SHIN K W, BYUN K E, SHIN H J, LEE S Y, LEE C S
EOM J H, YOON S G, HAN J H, SONG C K, YOON D H, YOUN D H, GYU S
GUO L, WEI T, RAN J, WANG J
LI G, LIU Q, LIN J, ZENG Q, ZHANG Z, MO Y, DENG X
JIN T, WANG Q, ZHOU B, DING X, SONG X, ZHANG M, YAN W
ZHANG X, GAI Z, GUO F, WANG Y, CHAI X, CHEN Z, ZHANG L, WANG S, JIANG X
