国家/地区 中国（8）
IPC部 C（10）
IPC大类 C23（10）
IPC小类 C23C（10） C01B（2） H01M（2）
IPC C23C016/54（10）
发明人 WANG W（3） MA Y（2） QU Y（2）
SHEN D（2） SONG S（2） TAN H（2）
WU Q（2）
公开年 2022（5） 2023（5）
申请年 2022（10）
专利权人 SUZHOU SHENG.（2）

Roll-to-roll graphene film production system, has feeding transition cavity, high temperature process cavity and discharging transition cavity connected with sliding seat, where sliding seat is connected with fixing device for fixing substrate.

LIAO R, JU Y, YI J, WANG W, WANG D

Substrate processing apparatus for manufacturing semiconductor device, comprises substrate support to support multiple substrates such that substrates are on substrate support, chamber sidewall surrounding side surface of substrate support, and upper plate having plate portions on substrate support.

OH S, AN S, LEE J, JEONG G, JUNG K O, LEE J H, AHN S J, OH S R

Composite current collector useful for enhancing conductivity, comprises e.g. high molecular support layer as central layer, nano-silver wire reinforced conductive layer arranged on both sides, the metal layer and the graphene reinforced conductive layer arranged between the metal layer.

ZHANG G, LI X, XIA J, ZHU Z, WANG S

Negative-pressure roll-to-roll preparation device for preparing graphene copper material, comprises pipeline, pay-off mechanism, take-up mechanism, heating mechanism, protective gas and carbon source supply mechanism, and valves.

WU Q, SONG S, MA Y

Box type negative-pressure roll-to-roll preparation device, has protective gas and carbon source supply mechanism connected with box body to introduce carbon source and protective gas into box body.

WU Q, SONG S, MA Y

Enhanced graphene film coating device based on plasma chemical vapor deposition (PECVD), has concave lantern ring supporting rod whose upper portion is provided with pushing plate, and bidirectional transmission screw rod whose end is provided.

DENG Z, TANG W, HUANG X, BAI J, SHI Y, LI B

Segmented roll-to-roll chemical vapor deposition graphene continuous growth device, has exhaust pipe whose end is provided with vacuum pump, and unwinding cabin and reeling cabin whose ends are wound on unreeling drum and winding drum.

PAN D, QU Y, TAN H, WANG W, SHEN D

Gas phase deposition furnace for graphene chemical processing, has main body whose upper end is fixedly connected with exhaust device, where right part of outer surface of main body is connected with discharging pipe.

YANG K, CHEN W

Manufacture of steel strip for battery case, involves performing continuous roll-to-roll process by joining leading edge of coil of nickel-plated steel strip to trailing edge of preceding coil of nickel-plated steel strip in joining section.

WITTEBROOD A J

Continuous chemical vapor deposition thin film manufacturing device comprises sample introducing cabin, heating cabin, process chamber and cooling chamber.

QU Y, TAN H, SHEN D, WANG W