国家/地区 中国（29） 美国（17） 韩国（13） 世界知识产权组织（8） 日本（3）
IPC部 C（55）
IPC大类 C23（55）
IPC小类 C23C（55） C01B（23） H01L（19）
B82Y（8） H01M（6） B22F（5）
C30B（3） H01B（3） H01G（3）
A61L（2） B01J（2） B05D（2）
B33Y（2） B65G（2） C09D（2）
IPC C23C016/26（55）
发明人 MA Y（5） LEE C S（4） LI J（4）
LEE C（3） WU Q（3） AHN S J（2）
AN S（2） BYUN K（2） BYUN K E（2）
ELSAYED K A M（2） IFUKU R（2） KIM K（2）
MAAROUF A A（2） MALLICK A B（2） MATSUMOTO T（2）
公开年 2023（55）
申请年 2022（37）  2021（12）  2023（6） 
专利权人 SAMSUNG ELEC.（5） APPLIED MATE.（3） SUZHOU SHENG.（3） LAM RES CORP（2）
TOKYO ELECTR.（2） UNIV IMAM AB.（2）

Forming graphene involves pretreating surface for processing using one or more pretreating flowrates of substrate gas scavenging gas composition or annealing gas composition, in presence of one or more pretreating temperatures, to produce contaminant-depleted surface.

PHILPOTT R, BARAKET M, SHERRILL V

Microwave plasma chemical vapor deposition device, has metal cavity wall arranged around periphery of reaction cavity, where metal cavity wall is configured for shrinking or expanding around reaction cavity.

XU G, LIU F, WU H, AN K

Layer-by-layer structure graphene-metal composite material for use in various applications e.g. military fields, has material structure formed by repeatedly arranging graphene-metal structure according to tightly stacking technique.

ZHANG Y

Hard mask film used in etching process for manufacturing semiconductor device, comprises first graphene layer, first amorphous carbon layer on first graphene layer, second graphene layer on first amorphous carbon layer, and second amorphous carbon layer on second graphene layer.

KIM Y, OH S, AN S, AHN S J, OH S R, KIM Y U, AN X

Synthesizing surface of aluminum oxide graphite for high-purity carbon materials, comprises e.g. raising temperature of reactor, placing aluminum oxide nanoparticles in inner center of reactor, and injecting reaction gas into reactor.

KIM C D, NAMKEE S

Preparing pipeline joint of loading graphene useful for hydraulic pipeline joint or fuel oil pipeline joint, involves transferring graphene film in graphene film-metal foil composite material to surface of metal pipeline joint using graphene film transfer method.

LUO G, WANG G, WANG X, LI J, ZHANG B

Wet and corrosion resistant coating is used for positive temperature coefficient (PTC) ceramic heater comprises PTC ceramic heater subjected for spraying treatment, deposition treatment, secondary spray coating and baking sequentially.

CHENG W, CHENG C

Depositing graphene or graphene oxide onto substrate from gaseous source of carbon precursor involves using plasma-enhanced chemical vapor deposition method, where carbon precursor consists of ethylene and the process is carried out in absence of carrier gas.

JOUIAD M, EL MARSSI M, LEJEUNE M

Flexible graphene thin film used for transparent electrode devices, comprises flexible substrate, titanium buffer layer grown on one side of flexible substrate by sputtering and graphene thin film layer grown in-situ in same equipment.

YOON S G, IREH H

Preparing secondary enhanced graphene gas gel useful in shoes, comprises introducing substrate layer on prepared graphene gas gel surface, performing chemical vapor deposition reaction and growing sheet layer or spherical graphene aggregate on surface of substrate layer.

ZHENG L, SHEN Y, ZHENG Y, WU L, WANG H