国家/地区 |
欧洲专利局(EPO)(13)![]() |
IPC部 |
C(13)![]() |
IPC大类 |
C23(13)![]() |
IPC小类 |
C23C(13)
C01B(9)
H01L(4)
B32B(3) H01M(3) B01D(2) C09D(2) C30B(2) |
IPC |
C23C016/26(13)![]() |
发明人 | |
公开年 |
2021(13)![]() |
申请年 | 2020(8) 2021(3) 2019(2) |
专利权人 | EV GROUP THA.(2) |
BURGGRAF J, JUERGEN B
MOKKAPATI V R, POVAZAY B, UHRMANN T, ULLMANN T, MOKKAPATI V R S S, SARMA M V R, THOMAS A
AGRAWAL K V, HUANG S, HSU K, AGRAWAL K, HWANG S, HUSH K, XU G
OEZYILMAZ B, TOH C T, ABIDI I H, OJIYLMAZ B, TOH C, ZHUO Z, OZYILMAZ B
HAVERMANS D, SALLARD S, SHAFIQUE A, VANGENEUGDEN D, VANHULSEL A, HARDY A, SALAH S, SHAFIK A, VAN GENUGDEN D, HARDY N
SCHWEIGKOFLER M, VENGUDUSAMY B, SEEMEYER S, LODERER D
SA G, CHEN L, LIANG T, DENG Y, SAGAR R U R