国家/地区 中国（13）
IPC部 C（13）
IPC大类 C01（13） C23（3）
IPC小类 C01B（13）
IPC C01B032/186（13）
发明人 PENG H（13）
公开年 2021（6） 2018（3） 2017（2）
申请年 2017（3）  2019（3）  2020（3）  2016（2）  2021（2） 
专利权人 UNIV PEKING（11） BEIJING GRAP.（6） UNIV GUANGXI.（2）

Device for preparing graphene by plasma enhanced chemical vapor deposition (PECVD), has first region of deposition furnace that is provided with overlapped portion, and second polar plate that is connected to grounding end of plasma source.

LIU Z, WU Q, CAO F, WANG X, WANG K, YANG H, PENG H

Carrier for batch preparation of graphene film comprises supporting plates for placing substrate for growing graphene, heating plates for heating substrate, and electrode assembly connected with heating plates.

ZHU Y, MA Z, GAO X, SHAN J, JIA K, PENG H, LIU Z

Graphene transfer method based on metal silver sacrificial layer by using chemical vapor deposition method to grow graphene on metal substrate, depositing silver on graphene, spin coating polymethyl methacrylate and etching metal substrate.

LI Q, SUN M, CHEN W, XU M, PENG H

Graphene composite metal foil double-side growth device has chemical vapor deposition furnace comprising plasma glow region and heating growth region, and connected with unwinding shaft and winding shaft on both sides.

PENG H, CAO F, YANG H, WANG K, WANG X, LIU Z

Growth method of multilayer graphene used for electrons, photoelectrons and catalysis by forming graphene core on substrate by vapor deposition, and changing growth condition, continuously growing, and forming multilayer graphene.

LIU Z, PENG H, SUN L, ZHONG S, LI Y, WANG Y, YU Y, CHEN B

Carrier used for preparing graphene by plasma enhanced chemical vapor deposition, comprises two oppositely set polar plates and growth substrate, where carrier comprises sleeve, hollow structure, first supporting parts and second supporting parts.

PENG H, WANG K, YANG H, WANG X, CAO F, WU Q, LIU Z

Parylene based graphene transfer involves using chemical vapor deposition method to grow graphene on obtained metal substrate to obtain graphene plus metal structure.

LI Q, CHEN W, PENG H, LI T

Graphene film roll-to-roll production device comprises a vacuum cavity, a vacuum pump assembly and a filling assembly, where the process gas further comprises one monitoring component, and a parameter control assembly.

PENG H, YANG Q, DONG G, ZHA B, LIU Z

Preparation of ultra-clean graphene involves using chemical vapor deposition, and providing foam copper above growth substrate.

LIU Z, PENG H, LIN L, ZHANG J, SUN L

Preparing graphene involves putting foam copper in copper substrate, introducing carbon source gas and hydrogen to perform chemical vapor deposition, and depositing surface that contacts copper substrate with foam copper.

LIU Z, PENG H, LIN L, ZHANG J