国家/地区 美国（6） 台湾（5） 世界知识产权组织（4）
IPC部 C（6）
IPC大类 C01（6） C23（6） H01（6）
IPC小类 C01B（6）
IPC C23C016/26（6） C23C016/455（3） C23C016/50（3）
H01J037/32（3） H01L021/02（3） H01L021/285（3）
H01L023/532（3） C01B031/04（2） C01B032/184（2）
C01B032/186（2） C23C016/54（2） H01L021/768（2）
发明人 INGLE N K（2） MALLICK A B（2） SINGHA R S（2）
WANG J（2）
公开年 2022（2）
申请年 2021（3） 
专利权人 APPLIED MATERIALS INC（6）

Processing semiconductor for producing high quality devices and structures, involves delivering carbon-containing precursor and hydrogen-containing precursor to processing region of semiconductor processing chamber, forming layer of graphene on substrate positioned in processing region of chamber.

INGLE N K, MALLICK A B, SINGHA R S, WANG J

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Processing semiconductor by generating plasma of carbon- and hydrogen-containing precursors, forming layer of graphene on substrate, and halting flow of carbon-containing precursor while maintaining plasma with hydrogen-containing precursor.

INGLE N K, MALLICK A B, SINGHA R S, WANG J, ROY S S

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Susceptor has first fluoro polymer layer that is arranged on first surface of susceptor portion, and graphene layer is arranged on first fluoro polymer layer.

VISSER R J, JEONG S, DODABALAPUR A

Method for depositing graphene on substrate for semiconductor device, involves heating substrate in chemical vapor deposition chamber and flowing carbon precursor into chamber.

PADHI D, JANZEN J, SHAIKH S, KIM B, CHIN B, KIM B H