国家/地区 世界知识产权组织（6） 美国（5） 英国（2）
IPC部 C（9）
IPC大类 C01（9）
IPC小类 C01B（9）
IPC B82Y040/00（3） C01B031/04（3） C01B032/182（3）
C01B032/186（3） B82Y030/00（2） C01B032/194（2）
C23C016/26（2） C30B025/22（2） C30B029/02（2）
C30B029/64（2） G01N027/12（2）
发明人
公开年 2013（2）
申请年 2020（3） 
专利权人

Pellicle used for reticle for extreme-UV exposure, comprises pellicle film through which extreme-UV rays transmit and support frame for supporting pellicle film, where pellicle film comprises multilayer thin film structure.

KIM Y H, KIMYONGHWAN

Substrate device useful for surface enhanced Raman scattering, comprises substrate with support surface, and graphene layer connected to support surface of substrate.

TAPASZTA LEVENTE, DOBRIK GERGELY, NEMESINCZE PATER, VANCSA PATER

System for growing crystalline material, has optical emission spectrometer (OES) that controls parameter in closed loop and maintains required proposition of plasma constituent for growth of crystalline materials in microwave plasma reactor.

SHARDA T, BHANDARI R, RAJNEESH B, TARUN S

Plasmonic or electronically resonant material used in sensor system for Raman spectrometer, comprises substrate, epitaxial growth layer comprising graphene layer, and interface layer formed between graphene layer and substrate.

ROBINSON J A, BRIGGS N, KNAPPENBERGER K, ZHAO T

Manufacture of graphene-based device used for e.g. gas sensor, involves providing graphene assembly, transferring graphene assembly to substrate, using photolithography and removing UV barrier layer and photoresist layer.

MIGLIORATO M, KUMAR R, MONTEVERDE U

Graphene boundary control method comprises providing an insulating substrate, placing in a growth chamber, introducing first reaction gas and controlling the flowrate of first reaction gas.

WANG H, CHEN L, HE L, XIE H, WANG X, XIE X

Synthesizing graphene involves annealing substrate in hydrogen gas atmosphere, subsequently undertaking deposition and nucleation step where relatively thick carbon layer is deposited onto substrate, and undertaking graphene growth step.

BOINTON T H, BARNES M D, RUSSO S, CRACIUN M, HARDISTY BOINTON T

Composition of graphene-based nanomaterials used in e.g. nanostructure and gas sensor, comprises atomic layer of graphene monoxide, where graphene monoxide is crystallographically ordered and configured to form diffraction rings.

CHEN J, GAJDARDZISKAJOSIFOVSKA M, HIRSCHMUGL C, MATTSON E, PU H, WEINERT M

Composition for controlled growth of graphene monolayers on a metal oxide surface, comprises a substrate, a metal oxide formed on the substrate, and graphene formed on the metal oxide.

JEFFRY K, KELBER J