国家/地区 中国（5） 美国（5） 日本（4） 韩国（4）
IPC部 C（7）
IPC大类 C01（7）
IPC小类 C01B（7）
IPC C01B032/182（7）
发明人
公开年 2018（2） 2022（2）
申请年 2017（2）  2022（2） 
专利权人 TOKYO ELECTR.（2）

Upper electrode assembly used in plasma processing apparatus, has heat transfer sheet that is mounted between electrode plate and metal plate and having vertically oriented portion with vertically oriented graphene structures.

TSUJIMOTO H, KOBUNE T, LI L, LEE L, KOBUNEDAKAKI

Preparing graphene electron microscope carrier net comprises spreading hydrocarbon mixture on surface of the graphene film formed on metal substrate, transferring graphene film to electron microscope carrier net, and cleaning hydrocarbon mixture-graphene film-electron microscope carrier net.

NI X, LU Y, LIU N, GUO C, WANG H

Field emission cathode based on graphene/metamaterial composite nanostructures used in the field of high brightness and coherent electron sources comprises e.g. base material on patterned vertical carbon nanotube array and graphene material.

XU J, SHI Y, ZHANG X

Anisotropic etching of graphene used as electronic material, involves generating hydrogen plasma using microwave plasma, and anisotropically etching graphene using generated hydrogen plasma.

IFUKU R, MATSUMOTO T

Porous silicon composite clusters used in carbon composite for electrode, comprise porous core comprising silicon secondary particles comprising aggregates of silicon primary particles comprising silicon, silicon oxide and graphene.

SON I, LEE J, PARK S, HAN S, SON I H, LEE J M, PARK S Y, LEE J H, HAN S S, LI Z

Graphene deposition process for deposition of graphene on substrates, involves generating radio frequency plasma at location proximate to substrate, while flowing precursor gas containing carbon through plasma and over substrate.

CHEN Z, CHUGH S, MEHTA R

Electron microscopy support, useful for receiving biological sample e.g. serum, plasma and saliva, comprises support member, and partially hydrogenated graphene attached to member, where member is attached to support film.

RUSSO C J, PASSMORE L A, RUSSO C, PASSMORE L