| 国家/地区 |
中国(14)
|
| IPC部 | C(8) H(5) |
| IPC大类 |
C01(6)
H01(5)
C23(4)
|
| IPC小类 |
C01B(6)
H01L(5)
C23C(4)
|
| IPC |
C01B031/04(6)
C23C016/26(3)
H01L021/28(2)
H01L021/336(2) |
| 发明人 |
XIE X(10)
DING G(7)
JIANG M(5)
WANG H(4) ZHANG Y(3) CHEN Z(2) DI Z(2) GONG Q(2) LI X(2) LIU X(2) SUN L(2) WANG S(2) WU T(2) XIE H(2) YU G(2) |
| 公开年 | 2012(7) 2013(5) 2014(2) |
| 申请年 |
2012(14)
|
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(14)
|
CHEN Z, WANG B, ZHANG H, ZHANG Y, WU Y, YU G, ZHAO Z
DING G, JIANG M, LI X, SUN J, WU T, XIE X
KANG X, LIU X, SUN Q, WANG H, XIE H, XIE X
CHEN Z, LIU X, WANG H, XIE H, XIE X, YU G, ZHANG Y
WANG H, XIE X, YANG X, ZHANG Y
DING G, DU F, JIANG M, XIE X
CHAI Z, CHEN J, LUO J, WU Q, YU T
DI Z, DING G, GONG Q, LIU Q, WANG H, WANG S, XIE X
