国家/地区 |
中国(13)![]() |
IPC部 |
C(13)![]() |
IPC大类 |
C30(13)
H01(4)
C23(2)
|
IPC小类 |
C30B(13)![]() |
IPC |
C30B029/02(7)
C30B025/18(6)
C30B025/02(3)
C23C016/26(2) H01L021/20(2) |
发明人 |
LI L(3)
CHEN X(2)
SUN L(2)
XU X(2) ZHANG Z(2) ZHAO X(2) |
公开年 |
2015(13)![]() |
申请年 |
2015(13)![]() |
专利权人 | SHANGHAI INS.(2) UNIV PEKING(2) UNIV SHANDON.(2) |
LIU K, ZHANG Z, XU X, YU D, WANG E
WANG X, LI J, ZHONG Q, ZHONG Y
FU G, QIN X, WANG F, ZHAO J
YANG Y, WANG R, ZHANG Z, ZHANG J
DU M, FANG Y, LI L, LI X
ZHANG R, ZHOU Y, SUN C
CHEN Z, SUI Y, ZHANG H, ZHANG Y, YU G
CHEN X, SUN L, XU X, ZHAO X
DENG L, HE L, JIANG M, LI L, XIE X, WU T, XIE H, WANG H, CHEN L