国家/地区 中国（11）
IPC部 C（11）
IPC大类 C23（11） H01（3） C30（2）
IPC小类 C23C（11） H01L（3） C30B（2）
IPC C23C014/06（11）
发明人 CHEN Z（3） HAO Y（3） LV J（3）
ZHANG J（3）
公开年 2016（11）
申请年 2016（7）  2015（4） 
专利权人 UNIV XIDIAN（3）

Method for synthesizing multi-layer graphene e.g. trilayer graphene, involves heat-treating catalytic metal layer on substrate while supplying methane gas, and synthesizing multi-layer graphene on heat-treated catalytic metal layer.

HAM M, SON M, HAM M H, SON M W, XIAN W, SUN M

Super-hydrophobic graphene oxide coating has inner coating which is set in contact with substrate and coating of graphene oxide that is evaporated on metal substrate using evaporation process.

JIANG C, WANG H, ZHOU Z

Preparation of multi-stage hard coating involves applying component formed of e.g. silver nitrate and graphene oxide on metal substrate, curing, depositing titanium nitride coating and aluminum-titanium nitride coating, and drying.

WU D, CHENG H, WANG T

Preparation of high c-axis oriented aluminum nitride thin film used for preparing surface acoustic wave device comprises spin coating graphene to substrate, reactive sputtering under nitrogen and argon mixed gas atmosphere, and depositing.

FU S, LI Q, PAN F, WANG M, ZENG F

Preparation of graphene insulation for metal substrate comprises heating graphene sample, depositing silicon on graphene surface and cooling.

ZHANG Y, WANG Y, GAO H

Growing method of aluminum nitride layer and gallium nitride layer on graphene by magnetic sputtering involves supplying hydrogen to quartz tube furnace containing clean copper tube, cooling and obtaining graphene.

CHEN Z, HAO Y, ZHANG J, LV J

Vacuum sputtering device comprises vacuum sputtering chamber, cathode plate with graphene block material, aluminum foil roll roller, aluminum foil receiving roller roll, aluminum foil transmission roller, and argon gas entrance port.

XIANG X

Growing gallium nitride with silicon graphene using magnetron sputtering of aluminum nitride involves using chemical vapor deposition method and growing graphene on metal substrate, obtained product is placing in mixed solution.

CHEN Z, HAO Y, ZHANG J, LV J

Method for growing gallium nitride/graphene-based magnetron sputtering aluminum nitride during manufacture of device, involves transferring monolayer graphene on aluminum oxide substrate, sputtering aluminum nitride, and heat-treating.

CHEN Z, HAO Y, ZHANG J, LV J, XU S, NING J, REN Z, WANG D, LIN Z

Preparation of stainless steel surface graphene anti-corrosion coating involves taking natural graphite, potassium permanganate and concentrated sulfuric acid, reacting, washing, dissolving in distilled water, and adding hydrazine hydrate.

JI X, LIU J, YANG W