国家/地区 中国（8）
IPC部 C（8） H（5） B（3）
IPC大类 C23（8）
IPC小类 C23C（8） C01B（5） B82Y（3）
C23F（2） H01L（2） H01R（2）
IPC C23C016/455（8）
发明人 TEO K B K（3） JOUVRAY A（2）
公开年 2021（3） 2016（2）
申请年 2014（2）  2021（2） 
专利权人 AIXTRON SE（3）

Method for production of atomic bilayer nanotape, involves oxidizing portion of monolayer to provide oxidized portion, and removing oxidized portion to provide atomic layer nanotape comprising transition metal dichalcogenide material.

HARUTYUNYAN A R, LI X

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Deposition of two-dimensional layer on substrate, involves feeding process gas through supply line into gas distribution chamber(s) of gas inlet containing gas outlet openings which open into process chamber, and heating substrate.

TEO K B K, MCALEESE C, CONRAN B R, MACALIZ C

Electrical contact for forming e.g. connector, is produced using material including layer comprising carbon material which is single graphene layer or graphene laminate on base material comprising metal material having preset resistivity.

MORI K, SHIMIZU T

Flow field plate useful for fuel cell, comprises electrically conductive substrate defining several flow channels, and carbon layer arranged over flow field plate, comprises component including graphene and/or carbon nanotubes.

LAKSHMANAN B, KAMEPALLI S, KAMMPARY S, AKESHIMAN B

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S

Apparatus for separating carbon-containing structures in form of nanotubes or graphene, has plate-shaped component that is arranged in process chamber housing and inserted in retaining recess formed in wall of process chamber housing.

RIPPINGTON D E, JOUVRAY A, RUPESINGHE N L, TEO K, TEO K B K, RUPESINGHE N

Method for manufacturing electrical conductor, involves depositing boundary cappings on defects of graphene layer to inhibit corrosion of the substrate layer at defects and depositing boundary capping material on substrate layer.

LIU Z, ZHENG M, MARTENS R I, MARTENS R