国家/地区 韩国（9）
IPC部 B（9）
IPC大类 B01（9）
IPC小类 B01J（9）
IPC B01J019/08（9）
发明人
公开年 2022（3） 2021（2）
申请年 2020（2）  2022（2） 
专利权人

Performing low-temperature direct growth method of multilayer graphene for manufacturing pellicle for extreme ultraviolet lithography, involves forming etch stopper on substrate, and forming seed layer on etch stopper, where seed layer is selected from boron nitride, or boron carbon nitride.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K

Nanocrystalline graphene used for complementary metal-oxide-semiconductor process, comprises grains in stack of graphene sheets.

KIM S, BYUN K, CHO Y, SHIN K, LEE E, LEE C, SONG H, SHIN H, YOON J, LEE S, LIM H, BYUN K E, CHO Y C, SHIN K W, LEE C S, SONG H J, SHIN H J, SU Y J, LEE S Y, LIM H S, LI Z, YOUN J, SHEN X, LI C, LI Y, ZHAO L, JIN S

Manufacturing graphene wrinkles using three-dimensional structure patterning process comprises etching transition metal thin film to form three-dimensional pattern and inserting into chemical vapor deposition chamber to synthesize graphene.

KIM J, WIMALANANDA M D S, LEE J M

Film used for sensor, comprises substrate comprising at least one chosen from graphene, reduced graphene oxide, and hexagonal boron nitride and transition metal dichalcogenide layer comprising rhenium oxysulfide.

SUNG P H, SEO J H

Exfoliating graphene flakes from graphite sample by compressing a graphite sample in an electrochemical reactor, and applying a voltage between the graphite sample and an electrode in the electrochemical cell.

ROSCHER S

Electron microscopy support, useful for receiving biological sample e.g. serum, plasma and saliva, comprises support member, and partially hydrogenated graphene attached to member, where member is attached to support film.

RUSSO C J, PASSMORE L A, RUSSO C, PASSMORE L

Graphene manufacturing device comprises a light source, and an illuminating unit for condensing linear light from the light source and irradiating on a thin film of a graphite oxide layer which is coated on a substrate.

BYUNG Y S, KIL S C, NAG E C, HYOUNG S S, HAN Y J, JUNG H L

Manufacture of graphene film used for manufacturing touch device, involves forming graphene oxide film on substrate, injecting nitrogen gas and carbon gas phase with chamber, irradiating oxidation laser and reducing to graphene film.

TAE H K, JONG H P, HEON K T, HYUN P J

Converting a graphene oxide target into graphene, comprises irradiating a graphene oxide target with a light to initiate deoxidation reaction.

GILJE S S, JWILYE E S, GILJE