国家/地区 美国（12）
IPC部 C（12）
IPC大类 C01（12） H01（7） G01（6）
B82（4） C23（4） G02（4）
G03（3） H05（3） G06（2）
IPC小类 C01B（12）
IPC C01B031/04（4） C01B032/184（3） C01B032/186（3）
C01B032/194（3） C23C016/26（3） G03F007/20（3）
B82Y040/00（2） C01B031/02（2） C01B032/182（2）
C23C014/18（2） G01N021/65（2） G01N027/02（2）
G01N033/00（2） G03F001/62（2） G06F003/041（2）
发明人 KIM M J（2）
公开年 2017（10）
申请年 2016（12）
专利权人 SAMSUNG ELEC.（2）

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Composite material for sensing reduced graphene oxide and silver nano particles, for electronic device, comprises reduced graphene oxide and silver nano particles.

NEELLA N, GADDAM V, RAJANNA K, NAYAK M M, MANJUNATHA N M, SUBRAHMANYAM D N, KONANDUR R

Method of monitoring defect formation or healing in graphene film, involves exposing material to incident radiation, and generating data indicative of defects to provide temporal or spatial change in rate and size of defect formation.

SWETT J L, BEDWORTH P V

Preparation of graphene-carbon nanotube laminate used in e.g. electrode material, involves dispersing graphene in aqueous solution of metal hydroxide, heating, laminating graphene and carbon nanotubes by dispersing in dispersion medium.

TANG JIE, ZHANG KUN, LI JING, YUAN JINSHI, QIN LUCHANG, SHINYA NORIO, TANG J, ZHANG K, LI J, YUAN J, QIN L, SHINYA N

Conductor for electronic device comprises substrate, conductive layer disposed on substrate and having islands containing graphene whose surfaces have p-type dopant, and another conductive layer containing conductive metal nanowire.

SOHN H, KWAK C, KIM M J, PARK H C, SHIN W, CHO Y

Manufacture of gas sensor for nitrogen oxide, involves placing microheater platform substrate having graphene-covered surface, to chemical vapor deposition reactor, injecting inert gas, hydrogen and sulfur source gas, reacting and cooling.

LI T, GUO L, LIANG C, WANG Y

Method for manufacturing pellicle for lithographic apparatus involves removing first substrate portion to form freestanding membrane from graphene layer, in which freestanding membrane is supported by second substrate portion.

PETER M, ABEGG E A, GIESBERS A J, KLOOTWIJK J H, NASALEVICH M A, VAN DEN EINDEN W T, VAN DER ZANDE W J, VAN ZWOL P, VERMEULEN J P M, VLES D F, VOORTHUIJZEN W, GIESBERS A J M, VAN ZWOL P J, VOORTHUIJZEN W P, VAN DEN EINDEN W T A J, VERMEULEN J P M B

Method for fabricating composite film structure for strain sensor system for measuring mechanical movements in biological sample, involves removing metal substrate from graphene and deposited metallic layer to form composite film structure.

ZARETSKI A, LIPOMI D J, SAVTCHENKO A, MOLOKANOVA E, MERCOLA M

Manufacturing method for nano structure antireflection film, involves forming antireflection film using graphene as growth substrate, after forming hexagonal graphene honeycomb lattice on silicon dioxide layer.

ZHA G

Preparing deposited graphene used as genosensor, comprises heating metal substrate and carbon source in sealed ambient environment, maintaining temperature and time sufficient to form graphene lattice and then cooling substrate.

SEO D H, PINEDA S, HAN Z J, OSTRIKOV K