国家/地区 中国（4） 美国（4） 韩国（3） 日本（2） 世界知识产权组织（2）
IPC部 C（8）
IPC大类 C23（8）
IPC小类 C23C（8） H01L（5） C01B（4）
C30B（2） H05H（2）
IPC C23C016/511（8）
发明人 BYUN K（2） BYUN K E（2） LEE C（2）
LEE C S（2） SHIN H（2） SHIN H J（2）
SHIN K（2） SHIN K W（2） WADA M（2）
WANG B（2）
公开年 2022（4） 2023（4）
申请年 2022（8）
专利权人 SAMSUNG ELEC.（2） TOKYO ELECTR.（2）

Film forming method involves loading substrate into processing container, forming interface layer having amorphous structure or microcrystalline structure on substrate by plasma of first mixed gas including carbon-containing gas and forming graphene film on interface layer.

NAKAMURA G, TERADA H, MATSUMOTO T, KABUKI N, WADA M, IFUKU R, NAKAMURA K, KAMURAGI N

Manufacture of wiring used in electronic device, involves growing graphene layer on substrate using plasma of hydrocarbon at specific temperature by plasma enhanced chemical vapor deposition, and doping graphene layer with metal.

LEE C, LEE M, SHIN H, BYUN K, KIM K, SHIN K, SHIN K W, KIM K B, BYUN K E, SHIN H J, HYUN L, LEE C S

Microwave power synthesis system useful in microwave plasma chemical vapor deposition reaction system in film deposition field, comprises e.g. power synthesis chamber used for synthesizing microwave fed by microwave feed ports after injection locking frequency and injection adjusting phase.

ZHONG N, HUANG M

Formation of graphene layer for semiconductor device, involves exposing substrate comprising conductive and dielectric materials to plasma to clean conductive material, and exposing substrate to another plasma to form graphene layer.

MEBARKI B, CHUA T C, VALENCIA C W, LEE J J, TANG X, CHEN X

Preparing metal/graphene/polycrystalline diamond film particle detector used in field of nuclear physics, comprises depositing layer of graphene on surface of patterned metal substrate as ohmic contact electrode layer and growing diamond film in situ on graphene, where metal substrate is copper foil.

XIONG Y, WANG B

Technology for preparing carbon-based material film based on common action of bias voltage and laser, comprises plasma chemical vapor deposition device based on adding bias and laser control.

ZHU J, WANG S, YANG D, DI M, WANG B

Nanocrystalline graphene used for complementary metal-oxide-semiconductor process, comprises grains in stack of graphene sheets.

KIM S, BYUN K, CHO Y, SHIN K, LEE E, LEE C, SONG H, SHIN H, YOON J, LEE S, LIM H, BYUN K E, CHO Y C, SHIN K W, LEE C S, SONG H J, SHIN H J, SU Y J, LEE S Y, LIM H S, LI Z, YOUN J, SHEN X, LI C, LI Y, ZHAO L, JIN S

Film formation method involves forming metal film on silicon-containing film of substrate, forming a graphene film on metal film, where metal film is silicided by heating metal film, and continuously performing film forming process.

UEDA H, WADA M, ZHEN