国家/地区 中国（23） 日本（2） 美国（2）
IPC部 C（19） G（5） H（5）
B（3）
IPC大类 C01（11） C23（8） G01（5）
H01（5） B32（2） C03（2）
C30（2）
IPC小类 C01B（11） C23C（8） H01L（5）
G01N（4） B32B（2） C30B（2）
IPC C23C016/26（5） C01B032/186（4） C01B031/04（3）
C01B032/194（3） C23C016/02（3） B32B009/00（2）
H01L021/02（2）
发明人 CHEN Z（9） SUI Y（9） YU G（9）
ZHANG Y（9） GE X（8） DENG R（7）
DI Z（5） HU S（5） LIANG Y（5）
WANG X（5） ZHANG M（5） WANG G（4）
WANG Z（4） XIE X（4） XUE Z（4）
公开年 2017（23）
申请年 2015（9）  2016（9）  2017（5） 
专利权人 SHANGHAI INST MICROSYSTEM INFORMATION（23）

Graphene boundary control method comprises providing an insulating substrate, placing in a growth chamber, introducing first reaction gas and controlling the flowrate of first reaction gas.

WANG H, CHEN L, HE L, XIE H, WANG X, XIE X

Room temperature terahertz detector based on thermoelectric effect of graphene, has ohmic contact electrodes on two ends of effective region of graphene use different thermal conductivity metal materials with different work functions.

LUO X, WANG C, TAN Z, CAO J

Graphene bionic light detector based on temperature adjusting performance has micro heater platform graphene on micro heater platform, and active film formed on surface of graphene, and light receptor protein is formed on to active film.

LI T, TONG J, WANG Y, ZHANG L, GAO A, ZHANG D, SONG H

Graphene bionic light detector, has electrode device installed on substrate and provided with testing electrode, power supply lead and power supply electrode, light receptor fixed on active film, and insulating layer installed on substrate.

LI T, WANG Y, TONG J, ZHANG L, GAO A, ZHANG D, SONG H

Graphene tumor marker sensor based on multifunctional nano protein film comprises e.g. transferring graphene to silicon dioxide substrate, multifunctional nano protein film and reaction cavity and nano protein film is BSA protein film.

MAO H, ZHOU L, WANG K, JIN Q, ZHAO J

Graphene glass has graphene film which is completely sealed between adhered glasses, so that first glass and second glass are not adhered by portion separated by graphene film.

ZHANG Y, YU G, CHEN Z, SUI Y, GE X, DENG R, LIANG Y, HU S

Preparing directly layer of controllable graphene on insulating substrate comprises forming insulating substrate on first metal layer, injecting carbon ions, forming second metal layer on surface of first metal layer and annealing.

DI Z, WANG Z, WANG G, ZHENG X, DAI J, XUE Z, ZHANG M, WANG X

Preparation of continuous single layer graphene on insulating substrate by providing insulating substrate, depositing germanium film on insulating substrate, using germanium film as catalyst and growing graphene at high temperature.

DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X

Preparation of patterned graphene involves providing insulating substrate, depositing germanium film on insulating substrate, etching desired pattern in germanium film, forming patterned germanium film, and continuously evaporating.

DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X

Preparing copper substrate based on cleaning process for manufacturing chemical vapor deposition graphene, involves providing copper substrate for preparing graphene, and then treating copper substrate in aerobic environment.

ZHANG Y, YU G, GE X, ZHANG H, CHEN Z, SUI Y, DENG R