| 国家/地区 | 韩国(10) 美国(7) |
| IPC部 |
H(7)
C(6)
G(4)
|
| IPC大类 |
H01(6)
C23(4)
C01(3)
G03(3) |
| IPC小类 |
H01L(5)
C23C(4)
C01B(3)
G03F(3) |
| IPC |
H01L029/16(4)
C01B032/186(3)
C23C016/02(3)
C23C016/26(3) C23C016/50(3) G03F001/22(3) H01L021/02(3) C23C016/513(2) G03F001/62(2) |
| 发明人 |
LEE C(12)
|
| 公开年 | 2021(5) 2022(5) 2020(2) |
| 申请年 |
2020(12)
|
| 专利权人 | SAMSUNG ELEC.(6) S S TECH CO.(3) |
LEE C, HONG J H, JEONG M W, PARK C G, YUN J W, LEESEUNGJO, KIM J, LEE H
SHIN C, LEE C, HONG J H, YUN J W, PARK C G, LEESEUNGJO, KIM J, LEE H
SHIN C, LEE C, HONG J H, YUN J W, PARK C G, LEESEUNGJO, KIM J, LEE H
TAI N, LEE C, CHANG C, LIN J, WU S, CHEN J, KUO Y
LEE E, SHIN H, SHIN K, BYUN K, KIM C, LEE C, LEE C S, BYUN K E, SHIN K W, SHIN H J
LEE C, LEE S, SHIN H, BYUN K, SHIN K, SHIN K W, BYUN K E, SHIN H J, LEE S Y, LEE C S
CHO Y, LEE C, KIM C, SHIN H, SHIN K, NGUYEN V L, SHIN K W, SHIN H J, LEE C S, CHO Y C
LEE C, SHIN H, HONG S, MA K, LEE C S, SUK S H, SHIN H J, LI C, SHEN X
