国家/地区 韩国(14) 美国(10) 中国(3) 欧洲专利局(EPO)(2)
IPC部 H(9) B(7) C(6)
IPC大类 H01(9) C01(6) B82(5)
C23(2)
IPC小类 H01L(9) C01B(6) B82Y(3)
B82B(2) C23C(2)
IPC C01B031/02(6) H01L029/06(6) H01L029/16(6)
H01L029/78(6) H01L021/336(5) H01L029/786(5)
H01L029/66(4) H01L029/08(3) H01L029/10(3)
B82B003/00(2) B82Y010/00(2) C01B031/04(2)
C23C016/26(2) H01L029/423(2) H01L029/739(2)
发明人 PARK S(14)
公开年 2014(9) 2015(3) 2013(2)
申请年 2013(14)
专利权人 SAMSUNG ELEC.(9) PARK S(4) UNIV SEOUL N.(4) BYUN K(3)
CHUNG H(3) HEO J(3) LG ELECTRONI.(3) SEO D(3)
SNU R DB FO.(3) SONG H(3) LEE J(2)

LEE J, CHUNG H, PARK S, BYUN K, SEO D, SONG H, HEO J, LEE J H, CHUNG H J, PARK S J, BYUN K E, SONG H J, HEO J S, HUH J, JUNG H, SONG C, SAIL D

BYUN K, PARK S, SEO D, SONG H, LEE J, CHUNG H, HEO J, BYUN K E, PARK S J, SONG H J, LEE J H, CHUNG H J, HEO J S

LEE D W, SHIN H, PARK S, BYUN K, SEO D, SONG H, WOO Y, LEE J, CHUNG H, HEO J, SHIN H J, PARK S J, BYUN K E, SONG H J, WOO Y S, LEE J H, CHUNG H J, HEO J S

LEE J, PARK S, BYUN K, SEO D, SONG H, SHIN H, CHUNG H, HEO J, LEE J H, PARK S J, BYUN K E, SONG H J, SHIN H C, CHUNG H J, HEO J S