国家/地区 德国（20）
IPC部 C（20）
IPC大类 C23（20）
IPC小类 C23C（20）
IPC C23C016/26（20）
发明人 TEO K B K（4） JOUVRAY A（3） THOMAS S（3）
CONRAN B R（2） GUINEY I（2） MCALEESE C（2）
公开年 2013（4） 2021（4） 2022（3） 2016（2） 2017（2）
申请年 2020（4）  2013（3）  2016（3）  2014（2） 
专利权人 AIXTRON SE（5） INT BUSINESS.（3） PARAGRAF LTD（2）

Producing graphene useful for electronic devices comprises forming graphene on non-metallic surface of substrate by chemical vapor deposition in reaction chamber and adding precursor in gas phase and suspended in gas into reaction chamber.

DIXON S, GRIFFITHS J, GRIFFIN R M, GUINEY I, THOMAS S

Multiple coated particles for metallic electrodes, comprises metal including copper, cobalt, ruthenium, nickel, palladium, iridium, platinum, an alloy based on any of these metals, and mixture of two metal-based alloys.

IHDE J, DEGENHARDT J, WUEBBEN T, REGULA C, WILKEN R, SHU S

Deposition of two-dimensional layers on substrate in process chamber, involves heating substrate, feeding reactive gas of carbon-containing chalcogenide, and adjusting substrate temperature, process chamber pressure, and partial pressure of reactive gas so that graphene is deposited as layer.

MCALEESE C, CONRAN B R, TEO K B K

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Tribological system useful for e.g. rotor bearings in wind turbines, comprises base body and sandwich lubrication having binder-free solid lubricant layer including solid lubricant and lubricant layer with lubricant.

SCHWEIGKOFLER M, VENGUDUSAMY B, SEEMEYER S, LODERER D

Deposition of two-dimensional layer on substrate, involves feeding process gas through supply line into gas distribution chamber(s) of gas inlet containing gas outlet openings which open into process chamber, and heating substrate.

TEO K B K, MCALEESE C, CONRAN B R, MACALIZ C

Producing polymer-coated graphene layer structure involves e.g. adding substrate to reaction chamber, supplying flow comprising precursor compound to form graphene layer structure, heating and spin-coating using polymer or polymer precursor.

GLASS H, GUINEY I, TYLER M, WALLIS R, THOMAS S, TAYLOR M

Device used to deposit graphene, carbon nanotubes and other coating, preferably carbon on strip-shaped element, comprises heat transfer-inhibiting unit placed between process zone and inlet opening and/or an outlet opening.

JOUVRAY A

Production of layered structure involves depositing catalyst structure onto substrate top surface containing non-electroconductive material, depositing graphene structure onto catalyst structure, and partially removing catalyst structure.

LUTZ T, PURKL F, ROELVER R, ROHLFING F

Composite material useful in passenger transport vehicle, preferably aircraft e.g. passenger aircraft and helicopter, comprises a magnesium alloy and a layer made of nanoscale graphene platelets on surface of the magnesium alloy.

KARCH C, LENCZOWSKI B, OSTROVSKY I