国家/地区 |
德国(20)![]() |
IPC部 |
C(20)![]() |
IPC大类 |
C23(20)![]() |
IPC小类 |
C23C(20)
C01B(12)
H01L(7)
B82Y(6) B32B(5) H01B(3) D01F(2) H01J(2) H01M(2) H05K(2) |
IPC |
C23C016/26(20)![]() |
发明人 |
TEO K B K(4)
JOUVRAY A(3)
THOMAS S(3)
CONRAN B R(2) GUINEY I(2) MCALEESE C(2) |
公开年 | 2013(4) 2021(4) 2022(3) 2016(2) 2017(2) |
申请年 | 2020(4) 2013(3) 2016(3) 2014(2) |
专利权人 | AIXTRON SE(5) INT BUSINESS.(3) PARAGRAF LTD(2) |
DIXON S, GRIFFITHS J, GRIFFIN R M, GUINEY I, THOMAS S
IHDE J, DEGENHARDT J, WUEBBEN T, REGULA C, WILKEN R, SHU S
MCALEESE C, CONRAN B R, TEO K B K
SCHWEIGKOFLER M, VENGUDUSAMY B, SEEMEYER S, LODERER D
TEO K B K, MCALEESE C, CONRAN B R, MACALIZ C
GLASS H, GUINEY I, TYLER M, WALLIS R, THOMAS S, TAYLOR M
LUTZ T, PURKL F, ROELVER R, ROHLFING F