国家/地区 中国（4） 美国（3）
IPC部 C（8）
IPC大类 C23（8）
IPC小类 C23C（8） H01L（5） C01B（3）
C30B（2） H01B（2）
IPC C23C016/34（8）
发明人 ZHANG Y（2）
公开年 2022（8）
申请年 2022（5）  2021（3） 
专利权人

Preparing single crystal substrate comprises forming gallium nitride porous layer on surface of sapphire substrate, depositing barrier layer e.g. silica to cover top surface of the porous layer, removing barrier layer, performing epitaxial growth of single crystal layer and separating.

LU J

Wafer used to chemical vapor deposition growth of uniform graphene comprises planar silicon substrate, insulating layer provided across silicon substrate, and barrier layer provided across the insulating layer.

DIXON S, KAINTH J, JAGT R, GUINEY I, BADCOCK T J

Apparatus for depositing two-dimensional material, comprises planar high-frequency antenna formed on second surface of dielectric window, and first gas nozzle configured to provide source gas into chamber.

SHIN H, SHIN K, LEE C, LEE C S, SHIN K W, SHIN H J

Making solar cell involves depositing multiple nanoparticles on surface of chemical vapor deposition substrate, heating substrate and nanoparticles at sub-atmospheric pressure, and contacting gaseous mixture comprising methane and hydrogen with nanoparticles.

ELSAYED K A M, MAAROUF A A

Producing insulating high thermal conductivity graphene film comprises placing activated base film in vapour deposition chamber, taking diborane and disilane as precursor material and ammonia and nitrogen as carrier and introducing argon gas for deposition, carbonizing and graphitizing, and rolling.

ZHOU Z, ZHU Q, ZHENG Z

LED display device useful in organic LED display device, has electrode pin provided with an LED light-emitting device, surface of the third heat dissipation layer provided with a fourth heat dissipation layer and first heat dissipation layer includes aluminum powder and graphene.

ZHANG Y, DENG W

Preparing gallium nitride film used for blue light emitting diode, comprises e. g. drying pre-processed substrate with high-purity nitrogen, adding into vacuum reaction chamber, heating, stabilizing first preset time, and using remote ammonia plasma to process second preset time.

YAN T, YE Z, REN W, WANG R, ZHANG Y

Forming bulk product utilized for forming real-world components, involves coating particulate conductive phase material with binder phase using deposition coating process, and forming coated conductive phase material into bulk material.

SHEEDY P, SCHMIDT W R