国家/地区 德国（14）
IPC部 C（14）
IPC大类 C01（14）
IPC小类 C01B（14） C23C（9） H01L（8）
B82Y（6） H01B（4） B05D（2）
B32B（2） C23F（2）
IPC C01B032/186（14）
发明人 THOMAS S（5） GUINEY I（4） TEO K B K（3）
DIXON S（2） JOUVRAY A（2） TAYLOR M（2）
TYLER M（2） WALLIS R（2）
公开年 2021（4） 2013（3） 2022（3） 2017（2）
申请年 2020（3）  2013（2）  2014（2）  2016（2）  2021（2） 
专利权人 PARAGRAF LTD（5） AIXTRON SE（3）

Producing graphene useful for electronic devices comprises forming graphene on non-metallic surface of substrate by chemical vapor deposition in reaction chamber and adding precursor in gas phase and suspended in gas into reaction chamber.

DIXON S, GRIFFITHS J, GRIFFIN R M, GUINEY I, THOMAS S

Deposition of two-dimensional layers on substrate in process chamber, involves heating substrate, feeding reactive gas of carbon-containing chalcogenide, and adjusting substrate temperature, process chamber pressure, and partial pressure of reactive gas so that graphene is deposited as layer.

MCALEESE C, CONRAN B R, TEO K B K

Forming graphene on silicon substrate for electronic device, comprises providing silicon wafer having growth surface free of native oxides in reaction chamber, and nitriding growth surface with nitrogen-containing gas with wafer.

DIXON S, GUINEY I, THOMAS S, THOMAS S C S

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Formation of diode for electronic application, involves providing graphene layer structures on substrates, treating structures with oxidant to form graphene oxide surface, and aligning structure against graphene oxide surface of structure.

WALLIS R, WALLACE R

Electrical generator for generating electricity from sea water, comprises graphene sheet/s comprising electrical contacts and having surface extending between electrical contacts arranged to contact flow of ion-containing fluid.

GUINEY I, TYLER M, THOMAS S, TAYLOR M

Producing polymer-coated graphene layer structure involves e.g. adding substrate to reaction chamber, supplying flow comprising precursor compound to form graphene layer structure, heating and spin-coating using polymer or polymer precursor.

GLASS H, GUINEY I, TYLER M, WALLIS R, THOMAS S, TAYLOR M

Graphene synthesis device used for synthesizing graphene wire, has thermal conversion unit that is provided close to center portion of chamber, and catalyst that is placed on thermal conversion unit and formed as thin and long metal.

WON D K, YUAN D

Electric conductor i.e. single wire, for conducting electrical power in flow direction of e.g. stator, of e.g. generator, has metallic conductor elements surrounded by graphene layers and stacked one above other in perpendicular direction.

FILIPENKO M, BEASLEY P

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S