国家/地区 美国（23） 韩国（16） 中国（11） 世界知识产权组织（10） 日本（6） 欧洲专利局（EPO）（5） 澳大利亚（2） 台湾（2）
IPC部 C（27）
IPC大类 C01（27）
IPC小类 C01B（27）
IPC C23C016/26（20） C01B031/04（17） H01L021/02（10）
H01L029/16（10） C01B032/186（7） C23C016/455（7）
C01B032/182（5） C23C014/34（5） H01B001/04（5）
C01B032/15（4） C23C016/02（4） C30B025/18（4）
C30B029/02（4） B01J023/755（3） B82Y030/00（3）
发明人 KIM Y（2） KIM Y K（2） LIN Y（2）
YONG K K（2）
公开年 2017（16） 2016（8） 2018（3）
申请年 2016（27）
专利权人 CHARMTRON CO.（2） SAMSUNG ELEC.（2）

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Producing thin film graphene oxide-bonded metal foil current collector for battery or supercapacitor, comprises preparing graphene oxide gel, dispensing and depositing layer of gel onto primary surfaces of foil, removing and heat treating.

ZHAMU A, LIN Y, JANG B Z

Spacecraft structure i.e. satellite, has exhaust source points whose portion is directed such that outflow from exhaust source points partially impacts functional component, and graphene coating comprising set of graphene flakes.

KHAYMS V, SINTON S W, BEDWORTH P V

Manufacture of porous graphene layer used for e.g. textile industries, involves carrying out chemical vapor deposition of carbon source on catalytically active substrate which catalyzes graphene formation, and forming graphene.

PARK H G, HEIGHT M, CHOI K, PARK H

Surface processing method for graphene substrate of e.g. organic LED used in electronic device, involves forming organic material on one portion of graphene and surface-processing and forming dielectric thin film on organic material.

JAE Y B, SE J K, HYUN J S

Manufacture of separator used for polymer electrolyte fuel cell, involves forming graphene film on surface of stainless steel in film-forming apparatus at preset temperature by microwave plasma chemical vapor deposition method.

KUMAGAI M, YOSHINO I, UMENO M, UCHIDA H

Processing method for growing metal-doped graphene, involves performing plasma enhanced chemical vapor deposition process with carbon precursor, metal precursor, and predetermined element precursor to form metal-doped graphene.

HUANG K, CHI Y, JI Y

Transfer method of graphene for laminating material and designing shape of object, involves adhering graphene to one side portion of imprint receptive seat, and passing imprint receptive seat and metal sheet through etchant to graphene.

KIM Y K, YONG K K, KIM Y

Graphene-based laminate used in e.g. organic light emitting device, transistors, comprises substrate, graphene layer on substrate, and inorganic layer comprising fluorine-containing lithium compound, formed on graphene layer.

PARK C, CHO S, SEO S, SHIN S, PARK C H, CHO S M, SEO S A, SHIN S M

Production of layered structure involves depositing catalyst structure onto substrate top surface containing non-electroconductive material, depositing graphene structure onto catalyst structure, and partially removing catalyst structure.

LUTZ T, PURKL F, ROELVER R, ROHLFING F