国家/地区 世界知识产权组织（45）
IPC部 C（45） H（28） B（15）
G（4） F（2）
IPC大类 C23（45）
IPC小类 C23C（44） C01B（22） H01L（17）
B32B（6） H01M（6） B82Y（5）
C30B（4） H01J（4） B01J（3）
H01B（3） H05K（3） H05H（2）
IPC C23C016/26（19） C01B032/186（10） H01L021/02（8）
C23C016/44（7） C23C016/02（6） C23C016/455（6）
H01L021/768（6） C23C016/40（5） C23C028/00（5）
H01L021/285（5） B82Y030/00（4） B82Y040/00（4）
C01B032/182（4） C01B032/194（4） C23C016/04（4）
发明人 LIM J（3） MATSUMOTO T（3） HEE L（2）
HYUN L J（2） IFUKU R（2） IMSUNGWOO（2）
JEON Y M（2） LEE H S（2） LIM H H（2）
LIM J C（2） LIM S W（2） LIU C（2）
MALLICK A B（2） NARKEVICIUTE I（2） PARK J G（2）
公开年 2022（22） 2021（18） 2023（5）
申请年 2021（45）
专利权人 TOKYO ELECTR.（5） APPLIED MATE.（3） DAEJOO ELECT.（2） LAM RES CORP（2）
UNIV SINGAPO.（2）

High temperature furnace tube for use in semiconductor process, has supporting plate distributed with multiple layers for supporting multiple substrates, where each substrate is placed on each layer of supporting plate.

WANG H, ZHANG S, SHEN H, LV C, ZHOU D, KIM J, PARK J S, WANG J, JIA S, ZHANG X, KIM Y

Wrinkle flattening unit for flattening wrinkles present in graphene composite structure, has rotation portion that comprises outer rotation unit having multiple suction holes communicating with branch passage and supporting one surface of composite structure.

CHO S M, CHO M G, OH H G, CHO M, OHHONGGI

Method for processing semiconductor, involves material layer formed on portion of liner and metal-containing layer, where layer of material comprises graphene and portion of material layer on liner is removed.

MALLICK A B, SINGHA R S, GHOSH S, ROY S S

Growing graphene layer structure on substrate used in opto-electronic device, e.g., solar cell, solar cell, light-emitting diode, organic light-emitting diode, electro-optic modulator, photodetector or diode, involves providing substrate on susceptor in chemical vapor deposition reaction chamber.

THOMAS S, GUINEY I, DIXON S

Device for producing graphene layer, has one electrode which is connected to positive pole of voltage source, and other electrode that is connected to negative pole and is provided for carbon ions accumulate in graphene attachment region so as to form graphene layer.

KREISCHER U

Vacuum processing apparatus for removing oxidizing gas, comprises decompressable process container, supply port that is formed on side wall of process container and configured to supply, to process container, and apparatus also comprises ionic liquid that absorbs oxidizing gas.

HAYAKAWA T, UMESHITA N, AKIYAMA K, SEKIGUCHI K, ASAKO R, NAKANO T, ARYAL D, ROTONDARO A, IWASHITA M, IIZUKA Y, UEDA H

P-type transparent conductor with highly reduced graphene oxide thin film, has substrate and highly reduced graphene oxide thin film deposited on the substrate, in which the film is directly grown on substrate by pulsed laser deposition.

RAO R M S, JUVAID M M, SARKAR S, VENKATESAN T

Laminate used for electronic device such as display device, comprises substrate, layer containing compound having condensed polycyclic hydrocarbon structure, and layer containing conductive material.

NAOYA N, KAZUNORI T, NOSAKA N, TAKANASHI K

Negative electrode current collector used for metal battery, comprises current collector substrate, two-dimensional material layer formed on portion of at least one surface of current collector substrate and having atomic thickness, and metal layer formed on portion of two-dimensional material layer.

SHIN H S, LEE S Y, KIM S H, KIM M S, SUK S H, YOUNG L S, SOO K M

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C