国家/地区 美国（7） 韩国（6） 日本（4） 世界知识产权组织（4） 中国（3） 欧洲专利局（EPO）（2）
IPC部 C（10）
IPC大类 C23（10）
IPC小类 C23C（10） C01B（5） H01L（5）
H01M（4） H01J（3） H05H（3）
IPC C23C016/44（10）
发明人 IFUKU R（2） LIM J（2） MATSUMOTO T（2）
SUGIURA M（2） UEDA H（2） WADA M（2）
公开年 2021（10）
申请年 2021（5）  2020（3）  2019（2） 
专利权人 TOKYO ELECTR.（2） UNIV SINGAPO.（2）

Printing and growing of three-dimensional conducting structure of elementary metal for three-dimensional packaging, involves supplying solution into plasma, and reducing oxidation state of metal by reactive plasma species to form metal.

KOEHNE J E, MEYYAPPAN M, GANDHIRAMAN R

Seed layer for inducing nucleation to form layer of material used for fabricating semiconducting devices, comprises layer of two-dimensional monolayer amorphous material with disordered atomic structure to form electric potential wells for bonding adatoms to seed layer by van der Waals interaction.

OEZYILMAZ B, TOH C T, ABIDI I H, OJIYLMAZ B, TOH C, ZHUO Z, OZYILMAZ B

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Battery used in energy storage devices and electrical storage comprises cathode comprising nickel-rich material and first sub-nanoscale metal oxide coating on nickel-rich material and anode comprising anode material and second sub-nanoscale metal oxide coating disposed on anode material.

GRIFFIN M, KONG F, LIM J

Film forming by cleaning interior of treatment container, extracting and removing oxygen inside treatment container, introducing substrate into treatment container, and forming carbon film on substrate by plasma chemical vapor deposition.

MAKOTO W, TAKASHI M, NOBUTAKE K, RYOTA I, MASAHITO S, HIROKAZU U, MATSUMOTO T, KABURAGI N, IFUKU R, SUGIURA M, UEDA H, WADA M, KABUKI N

Core-shell structure useful in anode material for secondary batteries comprises metal core, and shell which is graphene.

CHOI H Y, PARK J W, EUGENE L, DOH C H, BAE Y

Silicon-carbon composites in anode active material for secondary battery comprises core-shell structure comprising e.g. core comprising silicon-containing constituent with silicon crystal and first carbon and shell comprising second carbon.

OH S M, PARK J G, LIM J

Composite structure used as anode material for e.g. lithium battery, comprises graphene layers forming gaps by upper graphene layer and lower graphene layer, and silicon particles dispersed on graphene layers and embedded within graphene matrix.

YANG J

Processing device for forming film, consists of processing container having thermal sprayed ceramic coating on inner wall, mounting table for holding substrate and control unit for performing precoating and film forming.

WADA M, MATSUMOTO T, SUGIURA M, IFUKU R, UEDA H, KURYOTA L

Regulating number of molybdenum disulfide layers in molybdenum disulfide/graphene heterojunction comprises using methane and hydrogen, placing polished copper foil into quartz tube and graphene-transferred silicon dioxide/ substrate.

XU K, ZHOU Y, LI P