国家/地区 |
德国(11)![]() |
IPC部 |
C(11)![]() |
IPC大类 |
C23(11)![]() |
IPC小类 |
C23C(11)
C01B(9)
H01L(7)
B82Y(6) B32B(5) H01B(3) H01J(2) H01M(2) H05K(2) |
IPC |
C23C016/26(11)![]() |
发明人 | THOMAS S(2) |
公开年 | 2013(4) 2016(2) 2021(2) |
申请年 | 2013(3) 2016(2) |
专利权人 | INT BUSINESS.(3) |
GLASS H, GUINEY I, TYLER M, WALLIS R, THOMAS S, TAYLOR M
LUTZ T, PURKL F, ROELVER R, ROHLFING F
LAKSHMANAN B, KAMEPALLI S, KAMMPARY S, AKESHIMAN B
MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S
AVOURIS P, GARCIA A V, SUNG C, XIA F, YAN H
VLASSIOUK I V, SMIRNOV S N, PETER W H, SABAU A S, DAI S, FULVIO P F, IVANOV I N, LAVRIK N V, DATSKOS P G
BOL A A, CHANDRA B, KASRY A, MAAROUF A, MARTYNA G J, TULEVSKI G S
MCFEELY F R, YURKAS J J, OIDA S, HANNON J B