国家/地区 韩国（10） 世界知识产权组织（3） 欧洲专利局（EPO）（2） 美国（2）
IPC部 C（11） B（6） G（5）
H（2）
IPC大类 C01（11） B01（6） C23（3）
G03（3） C08（2） G02（2）
H01（2）
IPC小类 C01B（11）
IPC C01B032/182（11）
发明人 KIM H K（5） YANG W S（5） KIM H Y（3）
KIMHYUNGKEUN（3） MI K H（3） HAN S H（2）
JOJINWOO（2） KIM H M（2） KIM S G（2）
KIM Y K（2） LEE G H（2） LEE S J（2）
SEO J W（2）
公开年 2018（6） 2017（2） 2021（2）
申请年 2016（5）  2017（3）  2020（2） 
专利权人 KOREA ELECTRONICS TECHNOLOGY INST（11）

Pellicle used for exposure to extreme UV rays, comprises substrate having opening formed in central portion, etch stop layer formed on substrate to cover opening, and nanoporous graphene layer in which nanopores are formed on graphene layer, provided on etch stop layer.

KIMHYUNGKEUN, MI K H, KIM S K, JOJINWOO, KIM H Y

Preparing pellicle for extreme UV exposure with graphene defect healing layer, involves forming support layer of silicon nitride material on silicon substrate, and forming core layer of graphene material on support layer.

KIMHYUNGKEUN, MI K H, LEE W S, YANG H S, JOJINWOO, KIM B, JEONJUNHYUCK, LEE G H, KIM H Y, JEON J H, KIM S G, CHO J W, KIM H M, KIM H K

Directly growing multilayer graphene used in a pellicle for extreme ultraviolet lithography, involves forming small-layer graphene on SiN substrate, forming metal catalyst layer on small-layer graphene, and forming an amorphous carbon layer.

KIMHYUNGKEUN, MI K H, KIM H Y, LEE G H, SUNG K H, KIM H M, KIM S G, KIM H K

Method for manufacturing graphene, involves forming graphene layer on graphene growth substrate, and forming pattern for formation of graphene on graphene growth substrate.

KIM H K, KIM H

Producing high purity highly crystalline reduction graphene oxidation of silicon comprises graphite oxidation step of injecting and oxidizing graphite in Kuett-Taylor reactor, forming oxide graphene.

YANG W S

Preparing oxidized graphene, comprises injecting and oxidizing graphite in Couette-Taylor reactor, and converting oxidized graphite into graphene oxide by introducing oxidized graphite in Couette-Taylor reactor to peel off oxidized graphene.

YANG W S

Drying graphene oxide, comprises treating a washed graphene oxide with an organic solvent, and thermally drying the graphene grains.

YANG W S

Washing oxide graphene in washing device, involves separating unreacted sulfuric acid from oxide graphene slurry and washing above-mentioned separated oxide graphene by using aqueous solution.

YANG W S

Manufacture of graphene sheet involves placing metal foil in furnace, injecting reaction gas, heat-treating, forming graphene layer on metal foil by growing graphene on metal foil, and peeling graphene layer from foil.

YANG W S

Graphene composite electrode used for manufacturing electrochromic device, consists of graphene layer, atomic layer formed on graphene layer, and transparent conductive layer formed on atomic layer.

KIM H K, KIM Y K, HAN S H, LEE S J, SEO J W