国家/地区 世界知识产权组织（7） 美国（6） 台湾（5） 中国（4） 韩国（4） 欧洲专利局（EPO）（3） 日本（2）
IPC部 C（20） H（10） B（5）
G（2）
IPC大类 C01（20） C23（20） H01（10）
B82（2） C30（2） H05（2）
IPC小类 C01B（20）
IPC C23C016/26（20）
发明人 HEE L（2） HYUN L J（2） IMSUNGWOO（2）
JEON Y M（2） LEE E（2） LEE H S（2）
LIM H H（2） LIM J（2） LIM J C（2）
LIM S W（2） MATSUMOTO T（2） PARK J G（2）
WANG J（2）
公开年 2022（20）
申请年 2021（20）
专利权人 APPLIED MATE.（2） DAEJOO ELECT.（2） TOKYO ELECTR.（2）

Twin-chamber roll-to-roll graphene film manufacturing device useful for transparent display and flexible display having upper chamber with supply roller for supply catalytic metal film and winding roller for winding catalytic metal film.

KI K Y

Visualizing distribution and intrinsic orientation of periodically spaced one-dimensional structures by depositing electrically conductive solid film of imaging material onto surface of two-dimensional material, providing polarization microscope, and imaging layered composite at acquisition angles.

AMADO E, KRESSLER J

Forming a graphene layer structure used in Hall effect sensor, involves providing growth substrate having growth surface, and forming graphene layer structure on growth surface by chemical vapor deposition method, where growth surface is formed of material consisting of e.g. magnesium aluminate.

GRIFFIN R M, THOMAS S, GUINEY I, DIXON S

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Use of protective graphene coating involves depositing graphene on substrate to produce composite, removing substrate or graphene, and depositing graphene membrane on glassy surface for providing protection for screen and display case of two or three dimensional artwork e.g. museum.

GALIOTIS C, ANAGNOSTOPOULOS G, PASTORE CARBONE M G, PATERAKIS G, KOTSIDI M, GORGOLIS G

Processing semiconductor by generating plasma of carbon- and hydrogen-containing precursors, forming layer of graphene on substrate, and halting flow of carbon-containing precursor while maintaining plasma with hydrogen-containing precursor.

INGLE N K, MALLICK A B, SINGHA R S, WANG J, ROY S S

Forming film by carrying substrate having recess into processing container, placing on mounting table provided in processing container, using plasma of mixed gas containing inert gas and carbon-containing gas, while applying high frequency bias, and forming graphene film on substrate.

SUGIURA M, MATSUMOTO T

Porous silicon-carbon composite used for negative electrode active material for lithium secondary battery, comprises silicon particles, magnesium fluoride, and carbon.

LIM J C, LEE J, JEON Y M, LIM S W, PARK J G, LEE H S, LIM H H, NAM S J, LEE E, LIM J, HYUN L J, IMSUNGWOO, HEE L, JIN N, PARK S

Substrate processing method for processing substrate, involves performing first plasma processing while holding carried-in substrate in first position, and performing second plasma processing in state where substrate support pin is lowered and substrate is held at second position.

WADA M, KABUKI N, IFUKU R, MATSUMOTO T

DIAMOND-LIKE FILMS BASED ON MODIFIED GRAPHENECAN BE USED TO PRODUCE WIDE-BAND FILMS OF NANOMETER THICKNESS FOR OPTICAL DEVICES.

CHERNOZATONSKII L A, DEMIN V A, KVASHNIN D G