国家/地区 日本（5） 韩国（5） 世界知识产权组织（5） 美国（4） 中国（3） 欧洲专利局（EPO）（3）
IPC部 C（12）
IPC大类 C01（12）
IPC小类 C01B（12）
IPC C23C016/26（12）
发明人 IFUKU R（2） MATSUMOTO T（2） RYOTA I（2）
TAKASHI M（2）
公开年 2020（8） 2021（3）
申请年 2019（12）
专利权人 TOKYO ELECTR.（2）

Depositing layer of carbon nanostructures on substrate by providing substrate in processing chamber, providing processing gas in processing chamber having carbon monoxide gas and creating and sustaining gaseous plasma in processing chamber.

ZAPLOTNIK R, MOZETIC M, PRIMC G, VESEL A, HORI M, ODA O

Core-shell structure useful in anode material for secondary batteries comprises metal core, and shell which is graphene.

CHOI H Y, PARK J W, EUGENE L, DOH C H, BAE Y

Silicon-carbon composites in anode active material for secondary battery comprises core-shell structure comprising e.g. core comprising silicon-containing constituent with silicon crystal and first carbon and shell comprising second carbon.

OH S M, PARK J G, LIM J

Microball complex useful in cathode of lithium secondary battery comprises microballs having three-dimensional carbon nanotube matrix structure, graphene and silicon nanoparticles, and carbon coating layer.

YANG C M, JO A, KIM S Y, RYU J S, LEE M W, MINGOOK K, NA W

Providing hydroxylzing graphene, comprises depositing, predefined quantity of graphene on metal foil of predefined thickness, performing, poly(methyl methacrylate) spin coating of graphene to coated graphene and performing, etching of foil.

SINGLA R, KOTTANTHARAYIL A

Detecting abnormal growth of graphene by preparing inspected object having graphene film formed by chemical vapor deposition on substrate, using dark-field optical system to receive light from film and detecting abnormal growth of graphene.

IFUKU R, MATSUMOTO T, FUJIO A, SAITO K, RYOTA I, TAKASHI M, AKIRA F, KOUSAKU S

Forming graphene structure by preparing to-be-processed substrate, pre-processing by supplying gas containing carbon containing gas to to-be-processed substrate, and forming a graphene structure on surface of to-be-processed substrate.

IFUKU R, MATSUMOTO T, SUGIURA M, RYOTA I, TAKASHI M, MASAHITO S

Producing n-doped graphene films on substrate for e.g., optical device, by coating surface of substrate with doped polymer solution comprising alkali metal salt, polymer, and solvent and contacting graphene layer with coated substrate.

EISAMAN M, FOLKSON J, ANDRADE J

Method of forming graphene on substrate, involves treating surface of substrate placed in reaction chamber with plasma, and growing graphene on surface of substrate by plasma enhanced chemical vapor deposition (PECVD).

SHIN K, KIM C, YAMAMOTO K, LEE C, SONG H, LEE E, BYUN K, SHIN H, AN S, SHEN J, JIN C, SHAN B, LI C, SONG X, LI Y, BIAN Q, SHEN X, AN X, SHIN K W, LEE C S, SONG H J, BYUN K E, SHIN H J, AHN S J

Method for manufacturing multilayer graphene, involves subjecting graphene precursor to chemical vapor deposition on metal substrate containing nonmetal element, manufacturing graphene that is doped with element on metal substrate.

CHO K, YOO M S, LEE H C, CHO K W, ZHAO J, YU M, LI X