国家/地区 中国（20） 美国（15） 韩国（14） 世界知识产权组织（13） 日本（12） 欧洲专利局（EPO）（5） 台湾（5） 英国（4） 澳大利亚（3） 德国（2）
IPC部 C（49）
IPC大类 C01（49）
IPC小类 C01B（49）
IPC C01B032/186（49）
发明人 LIU Z（4） WANG X（4） BYUN K（2）
BYUN K E（2） CAO F（2） COLOSIMO N G R（2）
GLASS H（2） GUINEY I（2） IFUKU R（2）
LEE C（2） LEE C S（2） LEE E（2）
MATSUMOTO T（2） NARKEVICIUTE I（2） PENG H（2）
公开年 2021（49）
申请年 2020（19）  2021（18）  2019（12） 
专利权人 BEIJING GRAP.（4） UNIV PEKING（3） BAE SYSTEMS .（2） LAM RES CORP（2）
NINGBO INST .（2） PARAGRAF LTD（2） SAMSUNG ELEC.（2） TOKYO ELECTR.（2）

Method for forming film e.g. graphene film on substrate, involves supplying aromatic hydrocarbon gas having functional group, to substrate on which base film is formed, and activating aromatic hydrocarbon gas adsorbed on surface of base film by plasma of reaction gas containing rare gas.

MATSUMOTO T, IFUKU R

Device for preparing graphene by plasma enhanced chemical vapor deposition (PECVD), has first region of deposition furnace that is provided with overlapped portion, and second polar plate that is connected to grounding end of plasma source.

LIU Z, WU Q, CAO F, WANG X, WANG K, YANG H, PENG H

Graphene cold wall growth device, has power supply whose two poles pass through two through holes of reaction chamber, where two poles of power supply are connected with upper electrode plate and lower electrode plate.

CHEN Z, JI N, SHEN C, XU S, ZHANG J

Graphene composite film comprises graphene composite film main body comprising carbon nano-tube film substrate, and copper substrate.

MAO J

Continuous production apparatus of multiple types of carbon film, comprises reduction section for reducing substrate placed on belt conveyor, and raw material carbon source supply section that supplies raw material carbon source.

WATANABE J

Multi-layer graphene laminate used in electronic devices, comprises catalyst metal layer and stacked structure comprising graphene layer grown on one surface of catalyst metal layer.

YOON S G, IREH H

Transparent electrode for photovoltaic cells, comprises transparent substrate and composite layer including graphene layer and nanoparticles that are embedded in graphene layer and extended through thickness of graphene layer.

ELSAYED K A M, MAAROUF A A

Industrial mass production of vertical graphene composite carbon felt involves soaking carbon felt in acid solution, vibrating, repeatedly washing soaked carbon felt with deionized water, drying, and putting carbon felt on roller device.

QIN C, LI T, WANG Q, LOU H, SHI L, LUO L, HUANG S

Large-area graphene continuous deposition apparatus, has classifier for sorting carbon particles generated in pyrolyzer by size, and injector configured to grow graphene layer by spraying particles selected by classifier onto titanium layer.

YOUN D H, GYU S, KIM T J

Two-dimensional material forming apparatus comprises substrate moving unit, and two-dimensional material forming unit for forming two-dimensional material by spraying carbon gas on substrate moved by substrate moving unit.

SHIN U C