国家/地区 中国（8）
IPC部 C（8）
IPC大类 H01（8） C01（5） C23（4）
IPC小类 H01J（8）
IPC H01J037/32（4） H01J009/02（3） C01B032/184（2）
C01B032/186（2） C23C014/06（2） C23C016/26（2）
C23C016/455（2） C23C016/505（2） H01J001/304（2）
H01L021/285（2） H01L021/768（2）
发明人
公开年 2021（4） 2020（3）
申请年 2020（8）
专利权人

Semiconductor component useful in plasma reaction device and plasma etching process of process gas e.g. carbon tetrafluoride and oxygen, comprises conductive heat conducting material filled in pores of first corrosion resistant coating.

NI T, CHEN X, ZHU S

Electron-emitting element e.g. cold cathode-type electron source, has coating membrane that is film which transmits electron, and second electrode that is protective film of different material, and comprises electron emission surface.

MURAKAMI K, NAGAO M, KATSUHISA M, MASAYOSHI N

Using deposition system involves loading wafer into processing chamber equipped with RF system, supplying aromatic hydrocarbon precursor into processing chamber, turning on RF power of RF system to decompose aromatic hydrocarbon precursor into active radicals.

WU C, NI I, HSU Y, HUANG J, XU Y, WU Z

Depositing graphene on a metal surface of substrate by providing substrate including metal surface in reaction chamber, flowing hydrocarbon precursors into reaction chamber and toward the substrate, and generating radicals of hydrogen.

VARADARAJAN B N, NARKEVICIUTE I

Reactor system for producing carbon-containing powder, has microwave energy source, control circuit having output to generate control signal to adjust pulse frequency of microwave energy, voltage generator, and field-enhancing waveguide.

STOWELL M W, PHAM T V, ANZELMO B H, RISO T, RIESLE T, FAN D

Preparation of nitrogen-doped reducing graphene oxide field emitting cathode used e.g. for field emission device, by mixing graphene oxide and organic adhesive, dispersing, using one end of graphite rod to dip, and drying graphite rod.

SONG Y, YU Y, LI B

Surface multi-fold nitrogen-doped tubular graphene used for field emission cathode material which has tubular structure and specified quantity range of pipe diameter and is formed by staggered stacking of nitrogen-doped graphene sheets.

SONG G, LI Z, ZHANG J, LUO S, MENG A

Field emission cathode based on graphene/metamaterial composite nanostructures used in the field of high brightness and coherent electron sources comprises e.g. base material on patterned vertical carbon nanotube array and graphene material.

XU J, SHI Y, ZHANG X