国家/地区 中国（18）
IPC部 C（18） H（9） B（6）
G（2）
IPC大类 C23（18） H01（8） C01（7）
B22（3） B82（2） C25（2）
G01（2）
IPC小类 C23C（18） C01B（7） B22F（3）
H01L（3） H01M（3） B82Y（2）
H01B（2）
IPC C23C016/26（18）
发明人 LI J（2） MA Y（2） SONG S（2）
WU Q（2）
公开年 2023（18）
申请年 2022（18）
专利权人 SUZHOU SHENG.（2）

Hard mask film used in etching process for manufacturing semiconductor device, comprises first graphene layer, first amorphous carbon layer on first graphene layer, second graphene layer on first amorphous carbon layer, and second amorphous carbon layer on second graphene layer.

KIM Y, OH S, AN S, AHN S J, OH S R, KIM Y U, AN X

Preparing secondary enhanced graphene gas gel useful in shoes, comprises introducing substrate layer on prepared graphene gas gel surface, performing chemical vapor deposition reaction and growing sheet layer or spherical graphene aggregate on surface of substrate layer.

ZHENG L, SHEN Y, ZHENG Y, WU L, WANG H

Graphene-coated electrode material preparation system comprises inner part of outer wall of bottom beam provided with reciprocating component, inner part of top plate and bottom plate of reciprocating component provided with vibration component, and box body respectively provided with heating plate.

WANG Y

Preparation of additive used for preparing copper or copper alloy profile, involves coating graphene on raw material of copper or copper alloy powder surface, and performing high-energy beam additive manufacturing using obtained graphene modified copper or copper alloy powder.

LIU B, HOU H, LI T

Preparing gallium nitride nanowire/graphene composite material useful in sterilizing device, comprises providing substrate, forming layer of gold film on positive and negative surfaces of substrate, growing gallium nitride nanowire on substrate covered with gold film, and depositing graphene film.

LI J, FU Y, DAI Y, LIN C, WANG Z, LIN L, YANG Y, HU Y, XU Z, FU Z

Graphene carbide/silicon carbide composite material used in electromagnetic shielding device, comprises multiple graphene of silicon carbide crystal grains uniformly distributed to form thin film.

LI Z, ZHANG L, TU R, XU Q, ZHANG S

Improving quality of metal catalytic thin layer prepared by sputtering comprises cleaning Si/SiO2 substrate, photoetching the pattern, sputtering a layer of metal thin layer with the graphene of catalyzing and growing on the substrate sheet by using the sputtering table, peeling and etching.

ZHAO Y, YU X, LIU Z, NIE X, SONG Z, DENG J, HE X

Preparing polystyrene enzyme label plate of loaded graphene film involves using chemical vapor deposition to grow graphene on metal substrate to obtain first sample, spin-coating polymethyl methacrylate on front of first sample, and obtaining second sample after heating and curing.

HOU W, LI W, PAN D

Preparing a sponge nickel-loaded nitrogen and fluorine double-doped vertical graphene useful in e.g. preparing anode and cathode materials for lithium-sulfur batteries, comprises e.g. obtaining Ni(AC)2 aqueous solution, adding N2H4H2O and mixing to obtain reaction solution.

TU J, WANG X, QIU Z, XIA X

Copper foil graphite sheet comprises copper foil, graphene layer continuously deposited on copper foil surface, and nickel-plated layer which is distributed in non-continuous island shape between copper foil and graphene.

CHEN S, CAO F, WANG B