国家/地区 中国（11） 美国（5） 韩国（4） 台湾（2）
IPC部 C（15）
IPC大类 C23（15）
IPC小类 C23C（15） C01B（6） C25D（4）
H01L（4） C23F（3） C25B（2）
C30B（2） G03F（2）
IPC C23C028/00（15）
发明人 CHEN C（2） SUN M（2） TU C（2）
公开年 2017（10） 2018（3） 2016（2）
申请年 2016（15）
专利权人 TAIWAN SEMIC.（2）

Method for manufacturing multi-layer graphene composite sheet used in electronic device, involves forming uneven surface on surface of graphene layer, and forming second metal layer on second graphene layer by electroplating.

YANG W S

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Graphene pellicle method for extreme ultraviolet lithography, involves attaching carrier to graphene layer, removing substrate from first assembly, and removing first material layer from first assembly.

TU C, CHEN C

Manufacture of graphene sheet involves laminating nickel thin film on silicon dioxide film provided on surface of silicon substrate, laminating fullerene thin film on nickel thin film, and annealing resultant laminated structure.

JOONGKEE L, WONCHANG C, HUNGI J, CHAIRUL H, JAEYOUNG W, JIYOUNG K, JOOMAN W, AYOUNG K

Electronic apparatus has peeling prevention sections that are set with insulating film exposed from hole, and flange section that is contacted with one surface of graphene film inserted by insulating film and flange section.

KOJIMA E

Method of manufacturing coating layer structure applied to machine element, involves locating continuous graphene structure layer between metal substrate and coating layer to act as buffer structure between substrate and coating layer.

HUANG Y, HU C, HU Q, HUANG Y C, HU C L

Solar selective absorbent coating for solar heat collector, comprises base layer, infra-red reflecting layer, absorbing layer and reflection reducing layer, where absorbing layer comprises one layer of graphene material absorbing layer.

ZHANG J, LI A, LIU D

Preparation of composite thin-film material for e.g. for surface coating, involves cleaning electroconductive substrate, growing graphene film layer on cleaned surface, removing adsorbed electrolyte ions and depositing metal layer.

HU A, LING H, SUN M, JU L

Photo-induced oxidation-reduction reaction electrocatalytic electrode has copper thin film as bottom layer, two-dimensional graphene layer as intermediate layer and layer containing silver nanoparticles as upper layer.

CHEN F, LIU Y

Preparation of silver/graphene/titania nanotube composite film photoanode for photogenerated cathodic protection, involves fabricating titania nanotubes on surface of titanium substrate.

LI H, WANG X, HOU B