国家/地区 中国（15） 日本（6） 韩国（6） 美国（5） 世界知识产权组织（5） 欧洲专利局（EPO）（4）
IPC部 C（22）
IPC大类 C01（22）
IPC小类 C01B（22）
IPC C01B032/186（22）
发明人 HAO Y（2） IFUKU R（2） LI C（2）
MATSUMOTO T（2） RYOTA I（2） TAKASHI M（2）
公开年 2020（12） 2021（6） 2019（4）
申请年 2019（22）
专利权人 TOKYO ELECTR.（2）

Depositing layer of carbon nanostructures on substrate by providing substrate in processing chamber, providing processing gas in processing chamber having carbon monoxide gas and creating and sustaining gaseous plasma in processing chamber.

ZAPLOTNIK R, MOZETIC M, PRIMC G, VESEL A, HORI M, ODA O

Core-shell structure useful in anode material for secondary batteries comprises metal core, and shell which is graphene.

CHOI H Y, PARK J W, EUGENE L, DOH C H, BAE Y

Silicon-carbon composites in anode active material for secondary battery comprises core-shell structure comprising e.g. core comprising silicon-containing constituent with silicon crystal and first carbon and shell comprising second carbon.

OH S M, PARK J G, LIM J

Formation of diode for electronic application, involves providing graphene layer structures on substrates, treating structures with oxidant to form graphene oxide surface, and aligning structure against graphene oxide surface of structure.

WALLIS R, WALLACE R

Method for preparing graphene wafer in batches using carrier, involves using chemical vapour deposition process to prepare graphene film on substrate, in which angle between gas flow direction and substrate is provided with specified value.

LIU Z, JIANG B, GAO X

Preparing template framework film useful for e.g. lithium-ion battery, by blowing off dust in diatomaceous earth particles, acid washing, water washing, neutralizing acid solution remaining in pores of particles, and spin drying.

ZHANG W

Providing hydroxylzing graphene, comprises depositing, predefined quantity of graphene on metal foil of predefined thickness, performing, poly(methyl methacrylate) spin coating of graphene to coated graphene and performing, etching of foil.

SINGLA R, KOTTANTHARAYIL A

Preparation of graphene transparent conductive electrode, involves depositing graphene film on surface of metal foil, adhering to transparent flexible substrate, transferring obtained film to alcohol/water mixed solution, and drying.

LI J, LIU Q

Detecting abnormal growth of graphene by preparing inspected object having graphene film formed by chemical vapor deposition on substrate, using dark-field optical system to receive light from film and detecting abnormal growth of graphene.

IFUKU R, MATSUMOTO T, FUJIO A, SAITO K, RYOTA I, TAKASHI M, AKIRA F, KOUSAKU S

Forming graphene structure by preparing to-be-processed substrate, pre-processing by supplying gas containing carbon containing gas to to-be-processed substrate, and forming a graphene structure on surface of to-be-processed substrate.

IFUKU R, MATSUMOTO T, SUGIURA M, RYOTA I, TAKASHI M, MASAHITO S