国家/地区 中国（8） 美国（2） 世界知识产权组织（2）
IPC部 H（6）
IPC大类 H01（6）
IPC小类 H01L（6）
IPC H01L029/78（4） H01L021/336（3） H01L021/28（2）
H01L029/06（2） H01L029/16（2） H01L029/423（2）
发明人 ZHU H（4） JIN Z（3） YIN H（3）
LIANG Q（2） LIU X（2） LUO Z（2）
WANG X（2） ZHONG H（2）
公开年 2012（5） 2013（3）
申请年 2011（8）
专利权人 INST MICROELECTRONICS CHINESE ACAD SCI（8）

Manufacture of graphene involves adding powdery graphite into mixed solvent, ultrasonically treating, centrifuging and removing supernatant.

XIE J, ZHANG Y, LI C, LUO W, XIA Y

Manufacturing method for graphene device, involves providing substrate, where substrate comprises insulating layer and semiconductor layer, forming source/drain contact plug on back gate electrode.

ZHU H, LIU X, ZHONG H, LIANG Q, JIN Z

Diamond-like semiconductor substrate source/drain buried type graphene transistor device for small size and high frequency integrated circuit, has insulating medium layer arranged on upper part of metal gate electrode.

MA X, YIN H

Semiconductor device, has cap layer set on gate stack and sidewall surrounding gate stack and cap layer, and semiconductor layers epitaxially grown on exposed graphene layer, where metal contact layers are formed on semiconductor layers.

YIN H, LUO Z, ZHU H

Graphene oxide doped zinc oxide nanometer thin film manufacturing method, involves absorbing-coating mixed solution on sensitive membrane of device and drying in vacuum to obtain graphene doped zinc oxide nanometer film.

HOU C, HUO Z, LI D, LIU M, LONG S, YAN X, WANG X, ZHANG M, XIE C, ZHOU W

Method for manufacturing semiconductor device, involves forming graphene layer on insulating layer, forming gate structure on graphene layer, and forming doped region in semiconductor substrate.

LUO Z, YIN H, ZHU H

Method for preparing substrate of graphene thin film semiconductor device, involves providing metal catalyst layer with substrate, and forming tape clipping layer and adhesive tape layer on organic colloid layer.

GUO J, JIN Z, MA P, WANG X

Graphene device structure for use in complementary metal oxide semiconductor device, has semiconductor doped region and graphene layer that are formed as drain region and source region of device structure respectively.

LIANG Q, JIN Z, WANG W, ZHONG H, LIU X, ZHU H, YE T